SW-4-1-1: Micro-assembly of Reconfigurable Free Space Micro-optical benches
Prof. Philippe Lutz, Universite de France-Comte and FEMTO-ST Institute, Besancon, France
The integration of MEMS (Micro-Electro-Mechanical Systems) and MOEMS (Micro-Opto Electro-Mechanical Systems) technology in commercial products is growing especially in the field of telecommunication and sensor technologies. Heterogeneous microparts produced from various fabrication processes are frequently used to fabricate complex 3D microstructures through microparts robotic micro-assembly. The presented work focusses on the assembly of reconfigurable free space micro-optical benches. These MOEMS has been designed to be assembled and reconfigured. We have studied the assembly performances for these sytems. Future challenges linking microfabrication process and assembly will be discussed.
Philippe LUTZ joined the University of Franche-Comté, Besançon, as Professor in 2002. He is currently the head of the research group “Automated Systems for Micromanipulation and Micro-assembly” of the AS2M department of FEMTO-ST. He is the Director of the PhD graduate school of Engineering science and microsystems. His research activities are focussed on the design and the control of MicroMechatronic Systems. P. Lutz received several awards of IEEE, is author of over 60 refereed publications, serves as associate editor for the IEEE Transaction on Automation Science and Engineering (T-ASE) and and is an active member in the IEEE Robotics and Automation Society (RAS) Committee on Micro-Nano Robotics. He received the Engineer degree from the National School of Mechanics and Microtechnology (ENSMM) in 1990 and the Ph.D. Degree of the University of Franche-Comté in Automation and Computer Science in 1994. He was Associate Professor in the INSA of Strasbourg since 1994 until 2002.