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anotechnology and MEMS Thrust Area for Electrical Engineering Graduate Program
Faculty Members: K. Alavi, D. Butler, Z. Celik-Butler (Coordinator), J. C. Chiao, S. Iqbal, W. Kirk, F. Lewis, D. Popa, H. Stephanou, M. Tao, W. Zhou
Courses:
EE5343 SILICON INTEGRATED CIRCUIT FABRICATION TECHNOLOGY (2-3)
EE5344 INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS (MEMS) AND DEVICES (3-0)
EE5381 FOUNDATIONS IN SEMICONDUCTORS (3-0)
EE6342 ADVANCED QUANTUM DEVICES (3-0)
EE6344 NANOSYSTEMS AND QUANTUM ELECTRONIC DEVICES (3-0)
EE6345 ADVANCED MEMS – MICROELECTROMECHANICAL SYSTEMS (3-0)