Welcome to Nano Fab

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Untitled Document

How to Become a User

Important Links

Internal User Application

External User Application

User Fees Schedules

NanoFab Printable Brochure

SEM-FIB-Ebeam Writer Application

Equipment Contacts

Equipment Reservation and Status

Nano-MEMS Ph.D. Diagnostic Exam Information

The NanoFab Research & Teaching Facility features a 10,000-square-foot clean room. Several additional measurement laboratories with complete instrumentation are also located in the facility.
Research Facilities
Characterization Dimension 5000 AFM Electrical Test Station HP 4061A Test Station KLA-Tencor Alpha-Step IQ Profilometer Nomarski Microscope OCEAN OPTICS NC-UV-VIS REFLECTOMETER Zeiss LSM 5 Pascal Confocal Microscope Deposition AJA ATC ORION Series Thermal Evaporation System AJA ATC ORION Series Evaporation System AJA ATC ORION Series UHV Sputtering System CHA Electron-Beam Evaporator Home-Built Sputter System Neocera Pulsed Laser Deposition Facilities Nickel Electroplating PlasmaQuest Sputter TRION ORION II PECVD/LPCVD System Etching - Ashing Diener Electronics Asher PlasmaQuest Plasma Etcher Supercritical Point Dryer Technics Micro-RIE Series 800 Plasma System TRION Deep Reactive Ion Etching (DRIE) System TRION MINILOCK II RIE System Dicing & Wire Bonding Disco DAD3220 Automatic Dicing Saw, 160mm Microautomation 1100 Dicing Saw West Bond Model 7476E-79 Wedge Wire Bonder Kulicke & Soffa Model 4524 Ball Bonder Kulicke & Soffa (K&S) Model 4124-2: Ball Bonder	Photolithography OAI Model806 manual Front/Backside Contact Mask Aligner Karl Suss MA56 Contact Mask Aligner Nanonex NX-B200 Nano-Imprinter Blue_M IGP 6680 Inert Atmosphere Oven Spinner Hood & Wafer Bake Hotplates Chemical Hoods and Millipore DI Water System Furnaces LPCVD Nitride-Tystar TYSTAR TYTAN Mini 3600 Three Stack Horizontal Furnace System Tystar Furnace Minibrute Furnaces AXIC JetFirst 150 Rapid Thermal Anneal AG Associates Heatpulse 210: Rapid Thermal Annealing System FIB and E-beam Writer ZEISS 1540XB CrossBeam E-Beam Writer SEM ZEISS Supra 55 VP Scanning Electron Microscope STM RHK UHV 3000 Scanning Tunneling Microscope
Teaching Facilities
Electrical Test Station - TFAB Gaertner Ellipsometer Headway Spinner Jandel Four-point Probe System with RM3 Test Unit Lindberg Oxidation Furnace Minibrute Diffusion Furnace MJB3 Karl Suss Mask Aligner NRC Thermal Evaporator Veeco FPP-5000 Four-point Probe