Welcome to Nano Fab

Spring 2008 Fall 2007 Spring 2007 Fall 2006 Spring 2006 Fall 2005 Spring 2005

Untitled Document

How to Become a User

Important Links

Internal User Application

External User Application

User Fees Schedules

NanoFab Printable Brochure

Training Schedule

SEM-FIB-Ebeam Writer Application

Equipment Contacts

Equipment Reservation and Status

The NanoFab Research & Teaching Facility features a 10,000-square-foot clean room. Several additional measurement laboratories with complete instrumentation are also located in the facility.
Research Facilities
Characterization Dimension 5000 AFM Electrical Test Station HP 4061A Test Station KLA-Tencor Alpha-Step IQ Profilometer Nomarski Microscope OCEAN OPTICS NC-UV-VIS REFLECTOMETER Zeiss LSM 5 Pascal Confocal Microscope Deposition AJA ATC ORION Series Thermal Evaporation System AJA ATC ORION Series Evaporation System AJA ATC ORION Series UHV Sputtering System CHA Electron-Beam Evaporator Home-Built Sputter System Neocera Pulsed Laser Deposition Facilities PlasmaQuest Sputter TRION ORION II PECVD/LPCVD System Etching - Ashing Diener Electronics Asher PlasmaQuest Plasma Etcher Technics Micro-RIE Series 800 Plasma System TRION Deep Reactive Ion Etching (DRIE) System TRION MINILOCK II RIE System Dicing & Wire Bonding Disco DAD3220 Automatic Dicing Saw, 160mm Microautomation 1100 Dicing Saw West Bond Model 7476E-79 Wedge Wire Bonder Kulicke & Soffa Model 4524 Ball Bonder Kulicke & Soffa (K&S) Model 4124-2: Ball Bonder	Photolithography OAI Model806 manual Front/Backside Contact Mask Aligner Karl Suss MA56 Contact Mask Aligner Nanonex NX-B200 Nano-Imprinter Blue_M IGP 6680 Inert Atmosphere Oven Spinner Hood & Wafer Bake Hotplates Chemical Hoods and Millipore DI Water System Furnaces TYSTAR TYTAN Mini 3600 Three Stack Horizontal Furnace System Tystar Furnace Minibrute Furnaces AXIC JetFirst 150 Rapid Thermal Anneal AG Associates Heatpulse 210: Rapid Thermal Annealing System FIB and E-beam Writer ZEISS 1540XB CrossBeam E-Beam Writer MBE Ultra-high Vacuum Molecular Beam Epitaxy Chambers SEM ZEISS Supra 55 VP Scanning Electron Microscope STM RHK UHV 3000 Scanning Tunneling Microscope
Teaching Facilities
Electrical Test Station - TFAB Gaertner Ellipsometer Headway Spinner Jandel Four-point Probe System with RM3 Test Unit Lindberg Oxidation Furnace Minibrute Diffusion Furnace MJB3 Karl Suss Mask Aligner NRC Thermal Evaporator Veeco FPP-5000 Four-point Probe