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How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Zeiss LSM 5 Pascal Confocal Microscope

1 Channel, Argon + Green HeNe, MOTF
Software

* LSM 510 TOPOGRAPHY SW V4.0

* LSM STITCHART PLUS SW V4.0
6 Position Reflector Turret with Cubes for Different Reflected

* Techniques

* Brightfield

* Darkfield

* Polarized light
C-DIC
LSM5 Phototube
Motorized Scanning Stage
Fluorescence
Eye pieces: 5x, 10x, 20x, 50x, 100x
Vibration Isolation Table
Axiocam HRc Color Digital Camera

All Characterization Facilities
• Dimension 5000 AFM
• Electrical Test Station
• HP 4061A Test Station
• KLA-Tencor Alpha-Step IQ Profilometer
• Nomarski Microscope
• OCEAN OPTICS NC-UV-VIS REFLECTOMETER
• Zeiss LSM 5 Pascal Confocal Microscope
Back to All Facilities