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How to Become a User
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NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
TYSTAR TYTAN Mini 3600 Three Stack Horizontal Furnace System

Configured with 1 tube for wet/dry oxidation process
Processing up to 6’’/150 mm wafers
50 slot wafer carriers for 4’’/00mm wafers and 1 pickup tool
18’’ flat zone
Load Station with vertical, down draft Laminar Flow Module and Class 100 HEPA Filter
Automatic, Speed Controlled Non-Contact Cassette Loader
FCS-10/30 Touch Screen Panel Computer Control System
Vented Gas/Source Cabinet including 2 gas manifolds for N2 & O2 including a D.I. water bubbler with N2 purge
DCS 30 host computer control and data collection system

All furnace Facilities
• AG Associates Heatpulse 210: Rapid Thermal Annealing System
• AXIC JetFirst 150 Rapid Thermal Anneal
• LPCVD Nitride-Tystar
• Minibrute Furnaces
• Tystar Furnace
• TYSTAR TYTAN Mini 3600 Three Stack Horizontal Furnace System
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