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How to Become a User
Important Links
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External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Minibrute Furnaces

Boron Doping (p-type)
General purpose annealing

All furnace Facilities
• AG Associates Heatpulse 210: Rapid Thermal Annealing System
• AXIC JetFirst 150 Rapid Thermal Anneal
• LPCVD Nitride-Tystar
• Minibrute Furnaces
• Tystar Furnace
• TYSTAR TYTAN Mini 3600 Three Stack Horizontal Furnace System
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