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How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Electrical Test Station

Probe Station

*Micromanipulator Model: 8060-US8-V0-1-A

*Manual 200 mm probe station

*8” Triaxial Chuck

*Microscope with 2X zoom and 50X Super Long Working Objective

*Light Tight Enclosure, Roll Top Doors

*Vibration isolation table, 30” x 36”

*Manipulator, left handed 100 TPI, W/90degree mt. (2)

*Manipulator, right handed 100 TPI, w/90degree mt (3)
Probe Holder, Triaxial, 8000, Set Screw (5)

Textist

Test Station

*Agilent Technologies Model: 4155C – Semiconductor Parameter Analyzer
gilent Technologies Model: 4284A – Precision LCR meter 20Hz to 1MHz

Textist

All Characterization Facilities
• Dimension 5000 AFM
• Electrical Test Station
• HP 4061A Test Station
• KLA-Tencor Alpha-Step IQ Profilometer
• Nomarski Microscope
• OCEAN OPTICS NC-UV-VIS REFLECTOMETER
• Zeiss LSM 5 Pascal Confocal Microscope
Back to All Facilities