Fall 2009 Spring 2009 Fall 2008 Spring 2008 Fall 2007 Spring 2007 Fall 2006 Spring 2006 Fall 2005 Spring 2005

Untitled Document

How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
PlasmaQuest Sputter

* Three rotating magnetron sputter guns of 4��? diameter

* 8’’ variable temperature chuck with rotating substrate

* RF biased chuck for in-situ substrate cleaning

* Transfer chamber with automatic substrate loading/unloading

* Fully automated operation with manual option

All Deposition and Etching Facilities
• AJA ATC ORION Series Thermal Evaporation System
• AJA ATC ORION Series Evaporation System
• AJA ATC ORION Series UHV Sputtering System
• CHA Electron-Beam Evaporator
• Home-Built Sputter System
• Neocera Pulsed Laser Deposition Facilities
• Nickel Electroplating
• PlasmaQuest Sputter
• TRION ORION II PECVD/LPCVD System
Back to All Facilities