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How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
PlasmaQuest Plasma Etcher

  • ECR (electron cyclotron resonance) reactor
  • 2.45 GHz microwave generator
  • Advanced Technology Materials’ liquid delivery system
  • Transfer chamber with automatic substrate loading/unloading
  • RF biased chuck for vertical wall etching and in-situ substrate cleaning
All Etching-Ashing Facilities
• Diener Electronics Asher
• PlasmaQuest Plasma Etcher
• Supercritical Point Dryer
• Technics Micro-RIE Series 800 Plasma System
• TRION Deep Reactive Ion Etching (DRIE) System
• TRION MINILOCK II RIE System
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