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How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Dimension 5000 AFM

Tapping Mode, contact mode, MFM
Can accommodate up to 8” diameter wafer

All Characterization Facilities
• Dimension 5000 AFM
• Electrical Test Station
• HP 4061A Test Station
• KLA-Tencor Alpha-Step IQ Profilometer
• Nomarski Microscope
• OCEAN OPTICS NC-UV-VIS REFLECTOMETER
• Zeiss LSM 5 Pascal Confocal Microscope
Back to All Facilities