Fall 2009 Spring 2009 Fall 2008 Spring 2008 Fall 2007 Spring 2007 Fall 2006 Spring 2006 Fall 2005 Spring 2005

Untitled Document

How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
KLA-Tencor Alpha-Step IQ Profilometer

*Surface profilometer with 400 micron vertical range.

*Alpha-Step precision scanner standard vertical range to 400um with sub-angstrom electronic bit-wise vertical resolution.

*Zoom optics (88-247x)

*Stylus, 5um – 60Degree Radius

*Maximum scan length: 10mm

*Manual precision X-Y stage, 6.2” diameter theta table

*Acoustic Isolation hood and vibration isolation supports.

All Characterization Facilities
• Dimension 5000 AFM
• Electrical Test Station
• HP 4061A Test Station
• KLA-Tencor Alpha-Step IQ Profilometer
• Nomarski Microscope
• OCEAN OPTICS NC-UV-VIS REFLECTOMETER
• Zeiss LSM 5 Pascal Confocal Microscope
Back to All Facilities