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How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Minibrute Diffusion Furnace

Six inch diameter tube for up to 4” wafers
Temperature range of 200 °C to 1200 °C
For phosphorus doping (n-type)

All Teaching Facilities Facilities
• Electrical Test Station - TFAB
• Gaertner Ellipsometer
• Headway Spinner
• Jandel Four-point Probe System with RM3 Test Unit
• Lindberg Oxidation Furnace
• Minibrute Diffusion Furnace
• MJB3 Karl Suss Mask Aligner
• NRC Thermal Evaporator
• Veeco FPP-5000 Four-point Probe
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