Fall 2009 Spring 2009 Fall 2008 Spring 2008 Fall 2007 Spring 2007 Fall 2006 Spring 2006 Fall 2005 Spring 2005

Untitled Document

How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Jandel Four-point Probe System with RM3 Test Unit

MWP-6-SPEC Jandel Multiposition Wafer Probe Stand with

* Cylindrical four point probe head

* Compatible with wafers up to 6” in diameter

* Includes Cylindrical probe head: CYL-1.0-60-TC-60-8“
1.0 mm tip spacing

* High load – Adjustable with range of 60-150g, Factory Preset to 60g

* Tungsten carbide tips
60 micron tip radius

* Jandel RM3 Test Unit

* Constant current source and meter for use in making the four point probe measurement

* Simultaneous read-out of current and either mV or ohms-per-square

All Teaching Facilities Facilities
Electrical Test Station - TFAB
Gaertner Ellipsometer
Headway Spinner
Jandel Four-point Probe System with RM3 Test Unit
Lindberg Oxidation Furnace
Minibrute Diffusion Furnace
MJB3 Karl Suss Mask Aligner
NRC Thermal Evaporator
Veeco FPP-5000 Four-point Probe
Back to All Facilities