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How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Blue_M IGP 6680 Inert Atmosphere Oven

Inert Atmosphere
Maximum Temperature 593 °C
Programmable Controller

All Photolithography Facilities
• Blue_M IGP 6680 Inert Atmosphere Oven
• Chemical Hoods and Millipore DI Water System
• Karl Suss MA56 Contact Mask Aligner
• Nanonex NX-B200 Nano-Imprinter
• OAI Model806 manual Front/Backside Contact Mask Aligner
• Spinner Hood & Wafer Bake Hotplates
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