Fall 2009 Spring 2009 Fall 2008 Spring 2008 Fall 2007 Spring 2007 Fall 2006 Spring 2006 Fall 2005 Spring 2005

Untitled Document

How to Become a User
Important Links
User Policies
Internal User Application
External User Application
User Fees Schedules
NanoFab Printable Brochure
SEM-FIB-Ebeam Writer Application
Equipment Contacts
Equipment Reservation and Status
Nano-MEMS Ph.D. Diagnostic Exam Information
 
Spinner Hood & Wafer Bake Hotplates

PWM32-PS-R790 PROGAMMABLE SPIN COATER
Wide Motor Speed Range from 50 to 10,000 rpm.
Stainless Steel Bowl constructed in two separate pieces to move air flow to the outer edge of the bowl and out rather than pulling down directly out under the substrate.
Two (2) Stainless Steel 7.9’’ Diameter Bowls. One Bowl is permanent and one bowl is removable.
Polyethylene 7.9’‘diameter removable/replaceable bowl liner.
Polyethylene 7.9’‘diameter splash guard to eliminate splash back.
Exhaust port machined on the spinner as a standard feature.
Two (2) Bowl Drain Ports are standard.
Spin Time Range of 0 to 999.9 seconds.
Adjustable Acceleration from 100 – 20,000 rpm/sec.
Two Signatone temperature-controlled hotplates (8’’)
Four Thermoline hotplates (6’’ x 6’’)

All Photolithography Facilities
Blue_M IGP 6680 Inert Atmosphere Oven
Chemical Hoods and Millipore DI Water System
Karl Suss MA56 Contact Mask Aligner
Nanonex NX-B200 Nano-Imprinter
OAI Model806 manual Front/Backside Contact Mask Aligner
Spinner Hood & Wafer Bake Hotplates
Back to All Facilities