Key Features
Thermal and Photo-Curable Nanoimprint
Air Cushion PressTM (ACP) Guarantees
Uniformity Over Entire Imprint Field
Sub-10 nm Resolution
Automatic Imprint Operation
Up to 3’’ Diameter Circular Sample
Smart Sample Holder for Handling Irregular Shapes and Sizes and Piece Parts

System Specifications
Thermoplastic Imprint Module
-Temperature Range of 0 to 250°C – Heating Rate >200°C/minute – Pressure Range of 0 to 3.7 MPa (~500 psi)
Mold and Substrate Handling
-Maximum 3’’ Diameter Standard – Unique Ability to Handle Irregular Shapes and Sizes
Other Important Features
-Vacuum and Pneumatic Control
-Control Electronics
-PC with Microsoft Windows
-Manual Load/unload of Substrates
-Control Software
-Programmable Temperature, Pressure, and Time Duration – Automatic Execution – Footprint Size: 31’’ by 31’’
-Applications Includes: Nanophotonics, Displays, Data Storage,
Advanced Materials, Biotechnology, Nano-fluidics, etc.