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    Research Facilities



    Characterization

    • Dimension 5000 AFM
    • Electrical Test Station
    • HP 4061A Test Station
    • KLA-Tencor Alpha-Step IQ Profilometer
    • Nomarski Microscope
    • OCEAN OPTICS NC-UV-VIS REFLECTOMETER
    • Zeiss LSM 5 Pascal Confocal Microscope
    • More...



    Desposition

    • AJA ATC ORION Series Thermal Evaporation System
    • AJA ATC ORION Series Evaporation System
    • AJA ATC ORION Series UHV Sputtering System
    • CHA Electron-Beam Evaporator
    • Cressington Gold Sputtering Deposition
    • Home-Built Sputter System
    • Neocera Pulsed Laser Deposition Facilities
    • Nickel Electroplating
    • PlasmaQuest Sputter
    • TRION ORION II PECVD/LPCVD System
    • More...



    Etching-Ashing

    • Diener Electronics Asher
    • PlasmaQuest Plasma Etcher
    • Supercritical Point Dryer
    • Technics Micro-RIE Series 800 Plasma System
    • TRION Deep Reactive Ion Etching (DRIE) System
    • TRION MINILOCK II RIE System
    • More...



    Dicing-Bonding

    • EVG 520IS Wafer Bonder
    • Disco DAD3220 Automatic Dicing Saw, 160mm
    • Microautomation 1100 Dicing Saw
    • West Bond Model 7476E-79 Wedge Wire Bonder
    • Kulicke & Soffa Model 4524 Ball Bonder
    • Kulicke & Soffa (K&S) Model 4124-2: Ball Bonder
    • More...
  • FACULTY
  • RESEARCH
  • PRESENTATIONS

    DISTINGUISHED SPEAKER SERIES MICRO & NANO-SYSTEMS


    • Fall 2011
    • Spring 2011
    • Fall 2010
    • Spring 2010
    • Fall 2009
    • Spring 2009
    • Fall 2008
    • Spring 2008
    • Fall 2007
    • Spring 2007
    • Fall 2006
    • Spring 2006
    • More...

    ATTEND SPEAKER SERIES

    RSVP to Thanh Bui at tbui@uta.edu or 817-272-1536.  This series is in conjunction with EE 5344 – Introduction to MEMS, which is offered by UTA.  Information about this course and microsensor activities at UTA can be obtained from Professor Z. Celik-Butler at zbutler@uta.edu.          
  • CONTACTS

Research

 

  • Electronics Characterization Lab
  • Microsensors Lab
  • Nano-Bio Lab
  • Noise and Reliability Lab
  • Nanodevices Lab
  • Nonlinear Optics and NanoPhotonics Lab
  • Nanofab Characterization Lab
  • Wet Lab #1
  • Biodevices Lab

Associated UT Arlington Research Labs

  • Advanced Polymer Research Center
  • BioMEMS
  • Electronic MEMS & Nanoelectronics System Packaging Center
  • NanoPhotonics Research
  • Institute for Research in Security
  • Materials Science & Engineering Program
  • Center for Nanostructured Materials

Additional Nanotechnology Links

  • Consortium for Nanomaterials for Aerospace Commerce and Technology
  • National Science Foundation
  • Zyvex Corporation

 

  • User Policies
  • Internal User Application
  • External User Application
  • User Fee Schedules
  • NanoFab Printable Brochure
  • SEM-FIB-Ebeam Writer Application
  • Equipment Contacts
  • Equipment Reservation and Status
  • Nano-MEMS Ph.D. Diagnostic Exam Information

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