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Thursday, April 18, 2013
 

Oct 2014
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Today is:
Tue, Oct 21, 2014

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3:30pm
to
4:45pm
  Nanofab Speaker: Donald P. Butler  
(Lectures and Seminars)

"Flexible MEMS Sensors"

Flexible electronics is evolving to become a reality. This talk reviews our recent progress on the fabrication and characterization of a variety of MEMS (microelectromechanical) based sensors fabricated on flexible polymer substrates without the loss of performance, towards the development of a smart skin. These sensors include amorphous silicon based temperature sensors; infrared sensors; absolute pressure sensors, tactile sensors and force sensors; and capacitive accelerometers. The sensors are sandwiched between a polyimide substrate and superstrate, placing them at a low stress plane, thus packaged at device-level. The flexible sensor package is grown during the device fabrication process. This allows the sensors to be integrated directly with flexible circuit boards to maintain overall flexibility. Some notable features are the incorporation of a sealed vacuum cavity for the absolute pressure sensors and the formation of a hermetically sealed cavity to contain the accelerometers in a constant atmosphere.
More information...


Location: Nedderman Hall Rm 108
Contact: Thanh Bui
E-Mail: tbui@uta.edu
817-272-1536
   
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