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Microelectronics, MEMS, and Nanotechnology

11–14 December 2005

Brisbane, Australia

Conferences

Welcome From Chairs
Plenary Presentations
Participants

Conferences
MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING II

Conference 6035
Room: Z-504
Monday-Wednesday 12-14 December 2005
Proceedings of SPIE Vol. #6035

photo

Conference Chair: Alex J. Hariz, Univ. of South Australia (Australia)


Cochair: Vijay K. Varadan, Univ. of Arkansas (USA)

Program Committee: Yervant Zorian, Virage Logic Corp. (USA); Jugdutt J. Singh, Victoria Univ. (Australia); Olaf Reinhold, Defence Science and Technology Organisation (Australia); James G. Rathmell, The Univ. of Sydney (Australia); Hans-Jörg Pfleiderer, Univ. Ulm (Germany); Anthony E. Parker, Macquarie Univ. (Australia); Giacinta Parish, The Univ. of Western Australia (Australia); Warren Marwood, Defence Science and Technology Organisation (Australia); Franco Maloberti, Univ. degli Studi di Pavia (Italy); José López Feliciano, Univ. de Las Palmas de Gran Canaria (Spain); Kevin C. Liddiard, Electro-optics Sensor Design (Australia); Michael Liebelt, The Univ. of Adelaide (Australia); Torsten Lehmann, Univ. of New South Wales (Australia); Chee Yee Kwok, Univ. of New South Wales (Australia); Sandip Kundu, Univ. of Massachusetts/Amherst (USA); Sung-Mo Kang, Univ. of California/Santa Cruz (USA); Herbert B. Harrison, Griffith Univ. (Australia); Hedley J. Hansen, Defence Science and Technology Organisation (Australia); Manfred Glesner, Technische Univ. Darmstadt (Germany); Paul D. Franzon, North Carolina State Univ. (USA); Joan Figueras, Univ. Politècnica de Catalunya (Spain); Andrew S. Dzurak, Univ. of New South Wales (Australia); Sima Dimitrijev, Griffith Univ. (Australia); Ivan Curtis, Keyworks Technologies Pty. Ltd. (Australia); Bernard Courtois, TIMA Lab. (France); Sorin D. Cotofana, Technische Univ. Delft (Netherlands); Robert Clarke, RADLogic Pty Ltd. (Australia); Yves Blanchard, Groupe ESIEE Paris (France); Neil W. Bergmann, Univ. of Queensland (Australia); Subhas Basu, Silicon Interfaces (India); Mahfuz Aziz, Univ. of South Australia (Australia); Said F. Al-Sarawi, The Univ. of Adelaide (Australia); Derek Abbott, The Univ. of Adelaide (Australia)

Monday 12 December


            

Z-Block Lecture Theatre 411

08.30 Opening Remarks

08.45 to 09.35 Plenary Presentation
Complex Systems Insights for Technology (Y. Bar-Yam)

09.35 to 10.10 Morning Tea

See Plenary Presentations for further information.


            

SESSION 1

Room: Z-504 Mon. 10.10 to 10.50

Keynote Session

Chair: Alex J. Hariz, Univ. of South Australia (Australia)

10.10: A unique new microtechnology facility for Australia (Invited Paper), H. B. Harrison, Griffith Univ. (Australia) [6035-01]

SESSION 2

Room: Z-504 Mon. 10.50 to 12.30

Process Technologies

Chair: Olaf Reinhold, Defence Science and Technology Organisation (Australia)

10.50: Investigation of deep traps in nitrided and non-nitrided SiC-SiO2 interfaces, S. Dimitrijev, N. Khosla, Griffith Univ. (Australia) [6035-02]

11.10: The study of morphology of a-C:H films and the effect of the sp2 fraction disorder on micromechanical properties, M. Rybachuk, J. M. Bell, Queensland Univ. of Technology (Australia) [6035-03]

11.30: Thermal wave depth profiling for phosphorous ion implantation, A. Lee, Silterra Malaysia Sdn. Bhd. (Malaysia) and Univ. Sains Malaysia (Malaysia); T. Thirumal, Silterra Malaysia Sdn. Bhd. (Malaysia); I. Kamarulazizi, Univ. Sains Malaysia (Malaysia) [6035-04]

11.50: Fabrication of integrated optical fiber tip for micron CMMs touch trigger probe application, H. Ji, L. Kong, H. Hsu, G. C. Lin, Univ. of South Australia (Australia); K. Fan, National Taiwan Univ. (Taiwan) [6035-05]

12.10: Low-loss SPDT metal-to-metal contacts RF MEMS switch operated by electrostatic actuation, T. Seki, Ritsumeikan Univ. (Japan) and Omron Corp. (Japan); Y. Uno, K. Narise, T. Masuda, K. Inoue, S. Sato, F. Sato, Omron Corp. (Japan); K. Imanaka, Ritsumeikan Univ. (Japan) and Omron Corp. (Japan); S. Sugiyama, Ritsumeikan Univ. (Japan) [6035-06]

Lunch Break 12.30 to 13.30

SESSION 3

Room: Z-504 Mon. 13.30 to 15.00

System on Chip

Chair: Herbert B. Harrison, Griffith Univ. (Australia)

13.30: The potential of silicon carbide for memory applications: bridging the technological gap between data storage and data processing (Invited Paper), S. Dimitrijev, Griffith Univ. (Australia) [6035-07]

14.00: A real-time asymmetric multiprocessor reconfigurable system-on-chip architecture, X. Xie, J. A. Williams, The Univ. of Queensland (Australia) [6035-08]

14.20: Dynamic loading of peripherals on reconfigurable system-on-chip, Y. Lu, N. W. Bergmann, J. A. Williams, The Univ. of Queensland (Australia) [6035-09]

14.40: Energy efficient low-power shared-memory fast Fourier transform (FFT) processor with dynamic voltage scaling, D. Fitrio, J. J. Singh, A. Stojcevski, Victoria Univ. (Australia) [6035-10]

Afternoon Tea 15.00 to 15.30

SESSION 4

Room: Z-504 Mon. 15.30 to 17.00

RF and Wireless Circuits

Chair: Neil W. Bergmann, The Univ. of Queensland (Australia)

15.30: Emerging issues in millimeter-wave devices for telecommunications (Invited Paper), A. E. Parker, Macquarie Univ. (Australia) [6035-11]

16.00: Modeling, design, and simulation of tunable band pass filter using RF MEMS capacitance and transmission line, S. C. Saha, T. Sæther, Norwegian Univ. of Science and Technology (Norway) [6035-12]

16.20: Analysis of UHF RFID CMOS rectifier structures and input impedance characteristics, B. Jamali, D. C. Ranasinghe, P. H. Cole, The Univ. of Adelaide (Australia) [6035-13]

16.40: Innovative techniques for extending the range and node limits in Bluetooth-based wireless sensor networks, M. J. Fraser, D. V. Thiel, D. A. James, Griffith Univ. (Australia) and Ctr. for Wireless Monitoring and Applications (Australia) and CRC for Microtechnology (Australia) [6035-14]

Posters -Monday

Room: S-Block, S405A & S-0406 17.00 to 18.30

Poster authors can begin to post their papers at 8.00 on the scheduled day of presentation. Poster must be posted by 16.00. Each poster presenter is provided a space (1.1 m x 1.2 m) in which to display a summary of the paper. Authors must remain in the vicinity of the poster board during the poster session to answer the questions of attendees. Please remove your posters after the session; remaining posters will be discarded.

  • Design and implementation of an intelligent sensor system for health care application, H. P. Le, J. J. Singh, Victoria Univ. (Australia) [6035-27]
  • Study of single-chip silicon micromachined microphones, S. Gong, Merry Electronics Co., Ltd. (Taiwan) [6035-45]
  • Design and optimisation of power rectifiers for passive RFID systems in monolithic CMOS circuit, B. Jamali, P. H. Cole, The Univ. of Adelaide (Australia) [6035-46]
  • Subthreshold defect generation by intense electron beams in semiconductors for microelectronics, M. Ghoranneviss, A. Sari, M. Hantehzadeh, Azad Univ. (Iran); F. Osman, Univ. of Western Sydney (Australia); H. Hora, Univ. of New South Wales (Australia); R. Höpfl, Univ. of Applied Sciences (Germany) [6035-47]
  • Pull-in voltage of fixed-fixed end-type MEMS switches with variative electrostatic area, H. Sadeghian, G. Rezazadeh, Urmia Univ. (Iran) [6035-48]
  • Behavioral modeling and simulation of RF LNA with VHDL-AMS, H. Li, C. Miao, Tianjin Polytechnic Univ. (China) [6035-50]
  • Deposition of metallic film by evaporation amd lift-off techniques for MEMS interconnection technology, L. Huang, Huazhong Univ. of Science and Technology (China) [6035-52]
  • A novel improvement for Ka-band phase shifter, Q. Wu, B. Jin, Y. Wu, Harbin Institute of Technology (China) [6035-53]
  • The collaborative signal processing framework and algorithms for targets tracking in wireless sensor networks, H. Ma, B. W. Ng, The Univ. of Adelaide (Australia) [6035-54]
  • Transient SPICE model for trap-related gate lag in devices, S. U. Zaman, A. E. Parker, Macquarie Univ. (Australia) [6035-55]
  • Fabrication techniques for RF transmission lines on benzocyclobutene substrate, J. Wang, Y. Cai, J. Chiao, The Univ. of Texas at Arlington (USA) [6035-57]
  • An approach to accurate modeling of LIGA MEMS passive device integration for RF wireless communications, J. Fu, Q. Wu, X. Gu, C. Yang, Harbin Institute of Technology (China) [6035-58]
  • The room-temperature ferromagnetism in the nano-sized (Zn0.91Mn0.09)O grown by RF magnetron sputtering, D. Y. Kim, H. Y. Cho, Y. H. Lee, Dongguk Univ. (South Korea) [6035-59]
  • Current-voltage characteristics of n-ZnO/p-GaN heterojunction, D. Y. Kim, S. Lee, D. Kim, H. Y. Cho, Y. H. Lee, Dongguk Univ. (South Korea) [6035-60]
  • Design and simulation of an ultrasonic transducer, Z. Yu, Y. Shi, H. Hsu, L. Kong, Univ. of South Australia (Australia) [6035-61]
  • Traditional and total momentum-filtered thermionic devices, M. F. O'Dwyer, Univ. of Wollongong (Australia); T. E. Humphrey, Univ. of California/Santa Cruz (USA) and Univ. of New South Wales (Australia); R. A. Lewis, C. Zhang, Univ. of Wollongong (Australia) [6035-62]
  • A bulk machined thermo-resistive convection accelerometer, R. J. Adamec, D. V. Thiel, Griffith Univ. (Australia) [6035-64]
  • Characterising HEMT devices for MMIC distortion prediction, J. Brinkhoff, A. E. Parker, Macquarie Univ. (Australia) [6035-65]
  • A study on the design and characteristics of L-C thin-film filters at microwave band, I. Kim, B. Min, J. Song, Korea Electrotechnology Research Institute (South Korea) [6035-66]
  • Modulation recognition for real-HF signals, J. E. Giesbrecht, The Univ. of Adelaide (Australia); R. Clarke, Ebor Computing Pty Ltd. (Australia); D. Abbott, The Univ. of Adelaide (Australia) [6035-67]
  • Local-strain effect of the SiN/Si stacking and nanoscale triple gate Si/SiGe MOS transistor, K. Chiang, C. Chang, C. Chou, C. Han, C. Peng, National Tsing Hua Univ. (Taiwan) [6035-68]
  • Novel and efficient 4:2 and 5:2 compressors with minimum number of transistors designed for low-power operations, H. Thapliyal, P. Gopineedi, M. B. Srinivas, International Institute of Information Technology (India) [6035-71]
  • Novel reversible TSG gate and its applications for designing efficient subtractor units, H. Thapliyal, M. B. Srinivas, International Institute of Information Technology (India) [6035-73]
  • A new technique for improving the gain error of the instrumentation amplifier, M. K. Farzaneh, Univ. of New South Wales (Australia) [6035-75]
  • A beginning in the reversible logic synthesis of sequential circuits having features of online testability, H. Thapliyal, International Institute of Information Technology (India) [6035-76]
  • Design considerations of reconfigurable antennas, T. Ativanichayaphong, J. Chiao, The Univ. of Texas at Arlington (USA) [6035-77]
  • GHz behavior of resistance and inductance on signal delay in high-speed RLC interconnects, H. Thapliyal, International Institute of Information Technology (India); A. Gupta, Indian Institute of Technology/Kanpur (India); M. B. Srinivas, International Institute of Information Technology (India) [6035-78]
  • Validation of a soil interface model to account for apparent aberrations in capacitive soil moisture sensors, P. M. Johnson, D. V. Thiel, D. A. James, CRC for Microtechnology (Australia) and Ctr. for Wireless Monitoring and Applications (Australia) and Griffith Univ. (Australia); K. Watling, CRC for Microtechnology (Australia) and Griffith Univ. (Australia) [6035-79]
  • Considerations in the design of support circuitry for MEMS sensors in biomedical applications, K. L. Dunn, A. J. Hariz, Univ. of South Australia (Australia) [6035-80]
  • Design and fabrication of a MEMS-based piezoresistive pressure sensor for use in pharyngeal manometry, R. L. Petty, A. J. Hariz, Univ. of South Australia (Australia) [6035-83]
  • Optimization of flexure geometry in out-of-plane capacitive accelerometer for mechanical sensitivity enhancement, A. Manut, I. Mat, M. I. Syono, MIMOS Berhad (Malaysia) [6035-85]
  • Optimizing piezo-resistive strain gauge characteristics for intelligent strain sensing applications, D. S. Macnamara, D. V. Thiel, D. A. James, P. Lisner, Griffith Univ. (Australia) [6035-86]
  • Use of top-down methodology in industrial mixed-signals design, E. Liao, A. Postula, The Univ. of Queensland (Australia); Y. Ding, Nano Silicon Pte. Ltd. (Australia) [6035-88]
  • Cross Kelvin Resistor test structure chains for determining the specific contact resistance of semiconductor contacts, A. S. Holland, G. K. Reeves, RMIT Univ. (Australia) [6035-89]

Tuesday 13 December


            

Z-Block Lecture Theatre 411

08.30 to 09.20 Plenary Presentation
Small Brains, Small Minds: Vision, Navigation, and 'Cognition' in Honeybees (M. Srinivasan)

09.20 to 09.50 Morning Tea

See Plenary Presentations for further information.


            

SESSION 5

Room: Z-504 Tues. 09.50 to 10.50

New Frontiers

Chair: Michael Liebelt, The Univ. of Adelaide (Australia)

Keynote Presentation
09.50: Silicon-based quantum computing using buried donor architectures (Invited Paper), A. S. Dzurak, V. C. Chan, F. E. Hudson, S. E. Andresen, M. Mitic, A. J. Ferguson, R. Brenner, T. M. Buehler, D. J. Reilly, R. G. Clark, Univ. of New South Wales (Australia); C. Yang, D. N. Jamieson, The Univ. of Melbourne (Australia) [6035-91]

10.30: A commercial RF MEMS switch (Invited Paper), J. S. McKillop, TeraVicta Technologies (USA) [6035-16]

SESSION 6

Room: Z-504 Tues. 10.50 to 12.10

Analog and Digital Design

Chair: Sima Dimitrijev, Griffith Univ. (Australia)

10.50: Reduced wirelength and rounting complexity for LDPC decoder, G. Malema, M. Liebelt, The Univ. of Adelaide (Australia) [6035-17]

11.10: USPN: a novel smart environmental sensing platform, W. Luo, N. W. Bergmann, The Univ. of Queensland (Australia) [6035-18]

11.30: Static analog design methodology dedicated to ultra-low power circuits, F. Guigues, F. Rudolff, E. Kussener, Institut Superieur de l'Electronique et du Numerique (France) [6035-20]

11.50: A VLSI high-performance priority encoder, S. M. Abdel-Hafeez, S. Harb, Jordan Univ. of Science & Technology (Jordan) [6035-21]

Lunch Break 12.10 to 13.30

SESSION 7

Room: Z-504 Tues. 13.30 to 15.00

Telecommunication Circuits

Chair: Warren Marwood, Defence Science and Technology Organisation (Australia)

13.30: VLSI circuit and systems for microphotonic applications (Invited Paper), S. W. Lachowicz, A. M. Rassau, C. Kim, S. Lee, Edith Cowan Univ. (Australia) [6035-22]

14.00: Low-cost mm-wave Doppler/FMCW transceivers for ground surveillance applications, H. J. Hansen, R. W. Lindop, D. Majstorovic, Defence Science and Technology Organisation (Australia) [6035-23]

14.20: Discrete time-variable centre frequency BPSDM for HF software radio, Y. Zhu, The Univ. of Adelaide (Australia) [6035-24]

14.40: Matched filter design optimisation for UWB receiver for biomedical sensor network application, R. P. Naik, J. J. Singh, R. Veljanovski, Victoria Univ. (Australia) [6035-25]

Afternoon Tea 15.00 to 15.30

SESSION 8

Room: Z-504 Tues. 15.30 to 17.10

Advanced Devices and Circuits

Chair: Robert Clarke, RADlogic Pty Ltd. (Australia)

15.30: Non-bias optical sensor with use of photovoltaic effect of ferroelectrics, M. Ichiki, National Institute of Advanced Industrial Science and Technology (Japan) and Tokyo Denki Univ. (Japan); H. Furue, T. Kobayashi, Y. Morikawa, K. Nonaka, National Institute of Advanced Industrial Science and Technology (Japan); T. Nakada, Tokyo Denki Univ. (Japan); R. Maeda, National Institute of Advanced Industrial Science and Technology (Japan) [6035-87]

15.50: Design and implementation of a highly efficient piezoelectric power harvesting and vibration damping system, S. P. van der Velden, I. G. Powlesland, S. D. Moss, Defence Science and Technology Organisation (Australia); P. Beckett, RMIT Univ. (Australia); J. J. Singh, H. P. Le, Victoria Univ. (Australia) [6035-26]

16.10: The effect of barrier potential profile on thermionic refrigerator performance, M. F. O'Dwyer, Univ. of Wollongong (Australia); T. E. Humphrey, Univ. of California/Santa Cruz (USA); R. A. Lewis, C. Zhang, Univ. of Wollongong (Australia) [6035-28]

16.30: Micro hot-embossed plastic millimeter-wave systems, Y. Cai, The Univ. of Texas at Arlington (USA); F. Sammoura, Univ. of California/Berkeley (USA); C. Chi, Agilent Technologies, Inc. (USA); L. Lin, Univ. of California/Berkeley (USA); J. Chiao, The Univ. of Texas at Arlington (USA) [6035-29]

16.50: Resonant tunnelling through nc-Si/SiO2 superlattices, Z. Yu, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico) and CIDS-BUAP (Mexico); M. Aceves, E. Quiroga, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico); J. Carrillo, Benemérita Univ. Autónoma de Puebla (Mexico); H. Zhou, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico) [6035-30]

Wednesday 14 December


            

Z-Block Lecture Theatre 411

08.30 to 09.20 Plenary Presentation
Nanostructured Materials: Properties and Applications (F. Rosei)

09.20 to 09.50 Morning Tea

See Plenary Presentations for further information.


            

SESSION 9

Room: Z-504 Wed. 09.50 to 10.50

Electronic Materials

Chair: Giacinta Parish, The Univ. of Western Australia (Australia)

09.50: Characterising charge trapping in microwave transistors, J. G. Rathmell, The Univ. of Sydney (Australia) and Macquarie Univ. (Australia); A. E. Parker, Macquarie Univ. (Australia) [6035-31]

10.10: Improved contact resistance stability in a self-aligning MEMS in-line separable electrical connector, M. P. Larsson, R. R. A. Syms, Imperial College London (United Kingdom) [6035-32]

10.30: High-frequency characterization of nanoscale copper interconnects, T. K. S. Wong, R. Kumar, Nanyang Technological Univ. (Singapore) [6035-33]

SESSION 10

Room: Z-504 Wed. 10.50 to 12.30

Modeling and Simulations

Chair: Andrew S. Dzurak, Univ. of New South Wales (Australia)

10.50: Sensitivity to the onset of microfluidic slip length in a microchannel, R. Sitte, Griffith Univ. (Australia); J. Westphal, Otto-von-Guericke-Univ. Magdeburg (Germany) [6035-34]

11.10: Efficient simplification strategies for symbolic circuit expressions of linear analog integrated circuits, B. Thanigaivelan, A. Postula, The Univ. of Queensland (Australia) [6035-35]

11.30: Scaling effects on deep-submicron vertical MOSFETs, A. Ahmadi, D. D. Rowlands, K. Alam, Griffith Univ. (Australia) [6035-36]

11.50: Modeling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors, K. V. Shah, Victoria Univ. (Australia) [6035-37]

12.10: Knowledge-based process simulation and design system for MEMS, K. Hahn, J. Popp, A. Wagener, T. Schmidt, R. Brück, Univ. Siegen (Germany) [6035-38]

Lunch Break 12.30 to 13.30

SESSION 11

Room: Z-504 Wed. 13.30 to 15.30

Sensors and Biosensors

Chair: James G. Rathmell, The Univ. of Sydney (Australia)

13.30: Cooperating network of sensors for marine environment, F. Grimaccia, A. Gandelli, Politecnico di Milano (Italy); R. Johnstone, T. Chiffings, The Univ. of Queensland (Australia) [6035-39]

13.50: Sensitivity enhancement of adsorption-induced stress in perforated microcantilevers, S. Fernando, RMIT Univ. (Australia); J. P. Chaffey, Defence Science and Technology Organisation (Australia) [6035-40]

14.10: Field trial assessment of a bulk machined thermo-resistive hot-wire anemometer, R. J. Adamec, D. V. Thiel, Griffith Univ. (Australia) [6035-41]

14.30: An embedded wireless sensor network at 430 MHz for agricultural applications, D. A. James, Griffith Univ. (Australia) [6035-42]

14.50: Comparative study of SAW-based hydrogen sensors with: InOx/SiNx/36-YX LiTaO3 structure, A. C. Fechete, W. B. Wlodarski, A. S. Holland, K. Kalantar-Zadeh, RMIT Univ. (Australia); J. Antosziewski, The Univ. of Western Australia (Australia); S. Kaciulis, L. Pandolfi, Istituto per lo Studio dei Materialo Nanostrutturati (Italy) [6035-43]

15.10: A new investigation of high-frequency thermal response of CMOS thermal microsensor, S. Chen, C. Shen, National Changhua Univ. of Education (Taiwan) [6035-90]


            

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Daily Schedule

Important Dates

Conference Dates
11–15 December 2005
Pre-registration Deadline:
25 November 2005
Hotel Reservations by:
25 November 2005
Manuscripts Due:
14 November 2005


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50th Anniversary

CoSponsored By

Queensland University of Technology

Cooperating

The University of Adelaide (Australia)

Centre for Biomedical Engineering, Adelaide (Australia)


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