Conference 6037
Room: Z-606
Monday-Wednesday 12-14
December 2005
Proceedings of SPIE Vol. #6037
 |
Conference Chair: Jung-Chih Chiao, The Univ.
of Texas at Arlington (USA) |
|
Cochairs: Andrew S. Dzurak, Univ. of New
South Wales (Australia); Chennupati Jagadish, The
Australian National Univ. (Australia); David V. Thiel,
Griffith Univ. (Australia)
Program Committee: Richard J. Blaikie, Univ.
of Canterbury (New Zealand); Simon A. Brown, Univ. of
Canterbury (New Zealand); Carles Cané, Ctr. Nacional de
Microelectrónica (Spain); Mu Chiao, The Univ. of
British Columbia (Canada); Franck A. Chollet, Nanyang
Technological Univ. (Singapore); Debabani Choudhury,
HRL Labs., LLC (USA); Nicolaas F. de Rooij, Univ. de
Neuchâtel (Switzerland); John M. Dell, The Univ. of
Western Australia (Australia); Robert G. Elliman, The
Australian National Univ. (Australia); Masayoshi
Esashi, Tohoku Univ. (Japan); Lorenzo Faraone, The
Univ. of Western Australia (Australia); Catherine P.
Foley, Commonwealth Scientific & Industrial Research
Organisation (Australia); Paul D. Franzon, North
Carolina State Univ. (USA); Thomas George, Jet
Propulsion Lab. (USA); Katia M. Grenier, LAAS-CNRS
(France); Alex R. Hamilton, Univ. of New South Wales
(Australia); Kazuhiro Hane, Tohoku Univ. (Japan);
Erol C. Harvey, Swinburne Univ. of Technology
(Australia); Conrad D. James, Sandia National Labs.
(USA); David N. Jamieson, The Univ. of Melbourne
(Australia); Chantal G. Khan-Malek, CNRS Aeronmie
(France); Yong Hyup Kim, Seoul National Univ. (South
Korea); Youngwoo Kwon, Seoul National Univ. (South
Korea); Ronald A. Lawes, Imperial College London
(United Kingdom); Lih-Yuan Lin, Univ. of Washington
(USA); Liwei Lin, Univ. of California/Berkeley (USA);
Cheng-Hsien Liu, National Tsing Hua Univ. (Taiwan);
Victor M. Lubecke, Univ. of Hawaii at Manoa (USA);
Barry Luther-Davies, The Australian National Univ.
(Australia); Meyya Meyyappan, NASA Ames Research Ctr.
(USA); Giacinta Parish, The Univ. of Western Australia
(Australia); Steven D. Prawer, The Univ. of Melbourne
(Australia); Kazuo Sato, Nagoya Univ. (Japan);
Michael S. Shur, Rensselaer Polytechnic Institute
(USA); Michael J. Sinclair, Microsoft Corp. (USA);
Yu-Chuan Su, National Tsing Hua Univ. (Taiwan);
Hitoshi Tabata, Osaka Univ. (Japan); Ooi-Kiang
Tan, Nanyang Technological Univ. (Singapore); Alan R.
Wilson, Defence Science and Technology Organisation
(Australia); Sai Peng Wong, The Chinese Univ. of Hong
Kong (Hong Kong China) |
Monday 12 December
|
Z-Block Lecture Theatre 411
08.30 Opening Remarks
08.45 to 09.35 Plenary Presentation
Complex Systems
Insights for Technology (Y. Bar-Yam)
09.35 to 10.10 Morning Tea
See Plenary
Presentations for further information.
|
SESSION 1
Room: Z-606 Mon. 10.10 to 11.50
Fabrication Techniques I
Chairs: Daniel A. James, Griffith Univ.
(Australia); Vijay K. Varadan, Univ. of Arkansas (USA)
10.10: Process optimisation for compact high-aspect-ratio SU-8
microstructures using x-ray lithography, K. D. Vora, La Trobe
Univ. (Australia); B. Shew, National Synchrotron Radiation Research
Ctr. (Taiwan); E. C. Harvey, MiniFab (Australia); J. P. Hayes,
Swinburne Univ. of Technology (Australia); A. G. Peele, La Trobe
Univ. (Australia) [6037-01]
10.30: Ion-beam synthesis of WC/SiC nanocomposite thin layers
and their electron-field emission properties, W. M. Tsang, S. P.
Wong, The Chinese Univ. of Hong Kong (Hong Kong China); J. K.
Lindner, Univ. Augsburg (Germany) [6037-02]
10.50: Non-contact implant dose and energy metrology for
advanced CMOS low-energy implants, N. S. Mehta, B. Moser, A.
Varghese, J. Holt, Texas Instruments Inc. (USA) [6037-03]
11.10: Microchannel fabrication in PMMA based on localized
heating using high-repetition-rate femtosecond pulses, D. Day,
M. Gu, Swinburne Univ. of Technology (Australia) [6037-04]
11.30: µ-device fabrication and packaging below 300°C
utilizing plasma-assisted wafer-to-wafer bonding, R. L. Pelzer,
S. N. Farrens, EV Group (Austria) [6037-05]
Lunch Break 12.30 to 13.30
SESSION 2
Room: Z-606 Mon. 13.30 to 15.00
Optics
Chairs: Chris Brown, Griffith Univ. (Australia);
Jung-Chih Chiao, The Univ. of Texas at Arlington (USA)
13.30: Deep-UV LEDs: physics, performance, and
applications (Invited Paper), R. Gaska, Sensor Electronic
Technology, Inc. (USA) [6037-06]
14.00: Effects of dielectric overcoating on the absorption
enhancement of SOI LEDs with metal island films, S. Pillai, K.
R. Catchpole, T. Trupke, M. A. Green, Univ. of New South Wales
(Australia) [6037-08]
14.20: Absorption enhancement for metal particles on silicon
waveguides, K. R. Catchpole, S. Pillai, Univ. of New South Wales
(Australia) [6037-07]
14.40: Polymer microlens with independent control of radius
and focal length for an imaging fiber, M. Ashraf, F. A. Chollet,
V. M. Murukeshan, C. Yang, Nanyang Technological Univ. (Singapore)
[6037-09]
Afternoon Tea 15.00 to 15.30
SESSION 3
Room: Z-606 Mon. 15.30 to 16.40
Fabrication Techniques II
Chairs: Gregory S. Watson, Griffith Univ.
(Australia); David V. Thiel, Griffith Univ. (Australia)
15.30: Characterisation of deep wet etching of glass
(Invited Paper), C. I. Iliescu, B. Chen, Institute of
Bioengineering and Nanotechnology (Singapore); F. E. H. Tay,
Institute of Bioengineering and Nanotechnology (Singapore) and
National Univ. of Singapore (Singapore); G. Xu, Institute of
Bioengineerng and Nanotechnology (Singapore); J. Miao, Nanyang
Technological Univ. (Singapore) [6037-10]
16.00: In-situ optical monitoring of silicon membrane
etching, F. A. Chollet, G. H. Ooi, Nanyang Technological Univ.
(Singapore) [6037-11]
16.20: Anomalous backward scattering of light by a
two-side-open subwavelength nano-slit in a metal film, S. V.
Kukhlevsky, Univ. of Pécs (Hungary) [6037-13]
16.40: Preparation of photo-functional material, M. Ozaki,
Chitose Institute of Science and Technology (Japan) [6037-74]
Tuesday 13 December
|
Z-Block Lecture Theatre 411
08.30 to 09.20 Plenary Presentation
Small Brains,
Small Minds: Vision, Navigation, and 'Cognition' in
Honeybees (M. Srinivasan)
09.20 to 09.50 Morning Tea
See Plenary
Presentations for further information.
|
SESSION 4
Room: Z-606 Tues. 09.50 to 11.10
Materials
Chair: David V. Thiel, Griffith Univ. (Australia)
09.50: Fabrication of forward-type DC-DC converter using
nanocrystalline Mn-Zn ferrite, S. R. Murthy, Osmania Univ.
(India) [6037-14]
10.10: Microstructures and photocatalytic properties of
nitrogen-implanted titania nanostructured films, H. Zhou, T.
Tesfamichael, J. M. Bell, W. Martens, G. Will, Queensland Univ. of
Technology (Australia) [6037-15]
10.30: Nucleation and growth of silicon nanocrystals in
silicon oxynitride films with CO2 laser heating, A.
Tewary, R. D. Kekatpure, M. L. Brongersma, Stanford Univ. (USA)
[6037-16]
10.50: Preparation of DNA-polymer microsphere and its optical
property, M. Wada, Chitose Institute of Science and Technology
(Japan) [6037-18]
Lunch Break 11.20 to 13.30
SESSION 5
Room: Z-606 Tues. 13.30 to 15.00
Devices I
Chairs: Jung-Chih Chiao, The Univ. of Texas at
Arlington (USA); Gregory S. Watson, Griffith Univ.
(Australia)
13.30: Carbon nanotube-based microsensors and wireless sensor
network for physiological monitoring (Invited Paper), V.
K. Varadan, Univ. of Arkansas (USA) [6037-19]
14.00: Portable blood extraction device integrated with
biomedical monitoring system, S. Khumpuang, M. Horade, K.
Fujioka, S. Sugiyama, Ritsumeikan Univ. (Japan) [6037-20]
14.20: Development of micromotion sensors based on
piezoresistive and thermo-resistive effects in silicon, D. V.
Dao, V. T. Dau, Ritsumeikan Univ. (Japan); T. Shiozawa, H. Kumagai,
Tamagawa Seiki Co., Ltd. (Japan); S. Sugiyama, Ritsumeikan Univ.
(Japan) [6037-22]
14.40: Optical applications of marine DNA, K. Yamaoka,
Chitose Institute of Science and Technology (Japan) [6037-63]
Afternoon Tea 15.00 to 15.30
SESSION 6
Room: Z-606 Tues. 15.30 to 16.50
Devices II
Chairs: Ciprian I. Iliescu, Institute of
Bioengineering and Nanotechnology (Singapore); Vijay K.
Varadan, Univ. of Arkansas (USA)
15.30: Design and implementation issues for ceramic substrate
micro rf relay switches for reconfigurable antennas, M. E.
Parker, J. P. Chaffey, Defence Science and Technology Organisation
(Australia) [6037-23]
15.50: Bilateral interdigital CPW phase shifter using BaSrTiO3
thin film on poly-Si/Si substrate for electronically steerable
antenna architecture, H. Yoon, K. J. Vinoy, J. K. Abraham, The
Pennsylvania State Univ. (USA); V. K. Varadan, Univ. of Arkansas
(USA) [6037-26]
16.10: Antennas miniaturization by means of optimized EBG
materials, A. Gandelli, M. Mussetta, R. E. Zich, Politecnico di
Milano (Italy) [6037-27]
16.30: Optoelectronic investigation on biological effects of
microwaves, D. Creanga, P. Gasner, Univ. Al.I. Cuza (Romania)
[6037-92]
Posters -Tuesday
Room: S-Block, S405A & S-0406 17.00 to 18.30
Poster authors can begin to post their papers at 8.00 on the
scheduled day of presentation. Poster must be posted by 16.00. Each
poster presenter is provided a space (1.1 m x 1.2 m) in which to
display a summary of the paper. Authors must remain in the vicinity
of the poster board during the poster session to answer the
questions of attendees. Please remove your posters after the
session; remaining posters will be discarded.
- A new empirical model for heterojunction
phototransistors, P. Niu, Tianjin Polytechnic Univ. (China)
[6037-42]
- Effect of a buffer layer on the photovoltaic properties of
AZO/Cu2O heterojunction solar cells, T. Miyata, T. Minami,
Kanazawa Institute of Technology (Japan) [6037-43]
- Coating materials and particle size effect of nano- and
micro-sized iron powder composites, B. Min, I. Kim, S. Jeong,
J. Song, Korea Electrotechnology Research Institute (South Korea)
[6037-44]
- Flexible Bi2Te2.5Se0.5 and Bi0.5Sb1.5Te3 thermopile
generator, M. Shiozaki, S. Sugiyama, Ritsumeikan Univ.
(Japan); N. Watanabe, H. Ueno, K. Itoigawa, Tokai Rika Co., Ltd.
(Japan) [6037-45]
- Tuning the sensing range of silicon pressure sensor by
trench etching technology, H. Hu, Univ. of Pittsburgh (USA);
Y. Chou, Yung-Ta Insitute of Technology and Commerce (Taiwan); H.
Lin, Touch Micro-system Technology (Taiwan) [6037-47]
- Preparation of cyanine complex microdomes in self-organized
dewetted films, Y. Hashimoto, O. Karthaus, Chitose Institute
of Science and Technology (Japan) [6037-48]
- Development of fabrication process for shape control of
three-dimensional submicron structure by synchrotron radiation
lithography, S. Fujinawa, F. Kato, S. Sugiyama, Ritsumeikan
Univ. (Japan) [6037-49]
- Micropattening research of silicon-based ferro-electric
PMNT thin film, Q. Zhang, Y. Li, Institute of Electrical
Engineering (China) [6037-50]
- Carbon-nanotube-based nanoelectromechanical switch, H.
J. Hwang, K. R. Byun, J. W. Kang, K. O. Song, Chung-Ang Univ.
(South Korea) [6037-51]
- MEMS mechanical logic units: characterization and
improvements of devices fabricated with MicraGEM and
PolyMUMPs, S. Lee, R. W. Johnstone, A. M. Parameswaran, Simon
Fraser Univ. (Canada) [6037-52]
- Patterning frictional differentiation to a polymer surface
by atomic force microscopy, G. S. Watson, C. L. Brown,
Griffith Univ. (Australia); S. Myhra, Univ. of Oxford (United
Kingdom); S. Hu, J. A. Watson, Griffith Univ. (Australia)
[6037-53]
- Lithography of diamond-like-carbon (DLC) films for use as
masters in soft lithography, G. S. Watson, Griffith Univ.
(Australia); S. Myhra, Univ. of Oxford (United Kingdom); J. A.
Watson, Griffith Univ. (Australia) [6037-54]
- Tunable nano-array structures for controlling light
reflectance/transmission in the visible spectrum, J. A.
Watson, G. S. Watson, Griffith Univ. (Australia) [6037-55]
- Nitridation of thin metal layers by plasma immersion ion
implantation for diffusion barrier applications, M. Kumar,
Haryana College of Technology and Management (India); R. Yadav,
Semiconductor Complex Ltd. (India); D. Kumar, Kurukshetra Univ.
(India) [6037-56]
- Effects of Si spacer thickness on electroluminescences in
self-assembled Ge quantum dots superlattices, C. Park, D.
Kwak, S. Lee, Y. H. Lee, H. Y. Cho, W. Yang, Dongguk Univ. (South
Korea); C. Kim, SAMSUNG Advanced Institute of Technology (South
Korea); S. Choi, Kyung Hee Univ. (South Korea) [6037-57]
- Nanoparticle manipulation in plasma-assisted
nanofabrication of electron-field emitters based on single
crystalline carbon nanotip patterns, P. Rutkevych, Nanyang
Technological Univ. (Singapore); K. Ostrikov, The Univ. of Sydney
(Australia); S. Xu, Nanyang Technological Univ. (Singapore)
[6037-58]
- Nanostripes in superconducting REBa2Cu3O7-delta
superconductors: robust vortex pinning sites, A. Hu, Univ. of
Waterloo (Canada); H. Zhou, J. M. Bell, Queensland Univ. of
Technology (Australia); P. J. Evans, ANSTO (Australia) [6037-59]
- I-V response of a two-terminal nanodevice using
tight-binding theory, A. Alexopoulos, Defence Science and
Technology Organisation (Australia) [6037-60]
- Advanced simulation for shape-prediction of microstructures
fabricated by PCT technique, M. Horade, S. Khumpuang, K.
Fujioka, S. Sugiyama, Ritsumeikan Univ. (Japan) [6037-62]
- Electrical and optical properties of VO2 thin film affected
by preparation process, H. Jie, Sichuan Univ. (China)
[6037-65]
- Nitrogen ion implantation and characterization of tungsten
oxide films, T. Tesfamichael, Queensland University of
Technology (Australia) [6037-69]
- A measurement method of line-width and line-edge roughness
based on cellular neural networks, H. Li, X. Zhao, W. Chu, Z.
Xiao, N. Li, Harbin Institute of Technology (China) [6037-70]
- Dynamic analysis of a compliant bistable micromechanism
with one DOF system, J. Tsay, National Tao-yuan Agricultural
& Industrial Vocational High School (Taiwan); C. Sung,
National Tsing Hua Univ. (Taiwan) [6037-71]
- Modeling of sacrificial spin-on-glass (SOG) etching in
non-straight microchannels using Hhdrofluoric acid, A. A.
Hamzah, B. B. Y. Majlis, I. Ahmad, Univ. Kebangsaan Malaysia
(Malaysia) [6037-72]
- Nanowire sensor applications based on radio frequency phase
delay in coplanar waveguide, H. Yoon, T. Ji, The Pennsylvania
State Univ. (USA); V. K. Varadan, Univ. of Arkansas (USA)
[6037-75]
- Fabrication of DNA polymer gel and its photofunction,
Y. Kagami, M. Ozaki, M. Wada, N. Ogata, S. Horinouchi, K. Yamaoka,
Chitose Institute of Science and Technology (Japan) [6037-76]
- Fabrication of submicron three-dimensional structure by
plane-pattern to the cross-section transfer method using
synchrotron radiation lithography, F. Kato, S. Fujinawa, S.
Sugiyama, Ritsumeikan Univ. (Japan) [6037-78]
- Optical scanning devices based on PZT thick films formed by
aerosol deposition method, J. Park, A. Jun, M. Lebedev,
National Institute of Advanced Industrial Science and Technology
(Japan) [6037-80]
- Nanocontact printing of nonplanar substrates by using
flexible h-PDMS stamp, J. Jo, K. Kim, E. Lee, B. Choi, Korea
Institute of Machinery and Materials (South Korea) [6037-81]
- Combinatorial deposition by rf magnetron sputtering using
subdivided powder targets as new development method for thin-film
phosphors, T. Minami, Y. Mochizuki, T. Miyata, Kanazawa
Institute of Technology (Japan) [6037-82]
- Phase-shifted optical proximity correction: concept,
achievement, and potential advantages to photolithography, S.
Gao, Y. Li, Institute of Electrical Engineering (China) [6037-83]
- A fast dielectrophoretic cell sorter, H. Hu, Univ. of
Pittsburgh (USA); S. Chen, Massachusetts Institute of Technology
(USA) [6037-84]
- A micromachined hollow cathode discharge device for the
flexible display, J. S. Hwang, G. Y. Kim, S. S. Yang, S. Oh,
Ajou Univ. (South Korea) [6037-85]
- Design and modeling of a high-accuracy three-
degree-of-freedom MEMS manipulator, S. Venugopal, J. Chiao,
The Univ. of Texas at Arlington (USA) [6037-86]
- KOH etching process of perfect square MEMS corrugated
diaphragm, N. Soin, Univ. Malaya (Malaysia) [6037-87]
- Silicon dry-etching profile control by RIE at room
temperature for MEMS applications, D. Vrtacnik, D. Resnik, U.
Aljancic, M. Mozek, S. Amon, Univ. of Ljubljana (Slovenia)
[6037-88]
- Light emission and propagation in Er-doped silicon-rich
oxide layers, M. F. Forcales, A. R. Wilkinson, N. Smith, R. G.
Elliman, The Australian National Univ. (Australia) [6037-89]
- Stress-induced cracking in dielectric thin films on Si,
R. G. Elliman, M. A. Spooner, T. H. Kim, T. Weijers-Dall, The
Australian National Univ. (Australia) [6037-90]
- RF-magnetron sputtering of Perovskite-oriented
strontium-doped lead zirconate titanate thin films, S. Sriram,
Consultant (Australia); M. Bhaskaran, A. S. Holland, E. Fardin, S.
Kandasamy, RMIT Univ. (Australia) [6037-91]
Wednesday 14 December
|
Z-Block Lecture Theatre 411
08.30 to 09.20 Plenary Presentation
Nanostructured
Materials: Properties and Applications (F. Rosei)
09.20 to 09.50 Morning Tea
See Plenary
Presentations for further information.
|
SESSION 7
Room: Z-606 Wed. 09.50 to 11.00
Characterisation
Chairs: Remis Gaska, Sensor Electronic Technology,
Inc. (USA); Chris Brown, Griffith Univ. (Australia)
09.50: Concept design of a novel tactile probe tip for
down-scaled 3D CMMs, H. Ji, H. Hsu, L. Kong, G. C. Lin, Univ. of
South Australia (Australia); K. Fan, National Taiwan Univ. (Taiwan)
[6037-28]
10.20: Thermal and mechanical responses of thermomechanical
microprobe for high-density storage technology, K. Chiang, C.
Lin, National Tsing Hua Univ. (Taiwan) [6037-29]
10.40: Capacitance-voltage measurement in memory devices using
ferroelectric polymer, C. A. Nguyen, P. S. Lee, Nanyang
Technological Univ. (Singapore) [6037-30]
SESSION 8
Room: Z-606 Wed. 11.00 to 12.20
Materials and Characterization
Chairs: Franck A. Chollet, Nanyang Technological
Univ. (Singapore); Daniel A. James, Griffith Univ.
(Australia)
11.00: Conductivity of self-organized silicon quantum dots
embedded in its oxide, T. Fangsuwannarak, T. Puzzer, G.
Conibeer, E. Pink, Y. Cho, M. A. Green, Univ. of New South Wales
(Australia) [6037-31]
11.20: Nanofabrication of single-crystalline flat-panel
display microemitters: a plasma-building unit approach, K.
Ostrikov, The Univ. of Sydney (Australia); S. Xu, Nanyang
Technological Univ. (Singapore) [6037-32]
11.40: Formation of thick spin-on-glass (SOG) sacrificial
layer for capacitive accelerometer encapsulation, A. A. Hamzah,
B. B. Y. Majlis, I. Ahmad, Univ. Kebangsaan Malaysia (Malaysia)
[6037-34]
12.00: High-sensitivity biosensor with multilayers of metal
films based on SPR technique and the common-path heterodyne
interferometry, M. Chiu, L. Kao, B. Shih, C. Shih, National
Formosa Univ. (Taiwan) [6037-35]
Lunch Break 12.20 to 13.30
SESSION 9
Room: Z-606 Wed. 13.30 to 14.50
Nanotechnology
Chairs: Andrew S. Dzurak, Univ. of New South Wales
(Australia); Jung-Chih Chiao, The Univ. of Texas at Arlington
(USA)
13.30: Porous silicon nano-explosive devices, M. du
Plessis, Univ. of Pretoria (South Africa); C. Conradie, African
Explosives Ltd. (South Africa) [6037-36]
13.50: Characterisation of nanocrystalline titanium dioxide
films grown by atmospheric pressure plasma electrolytic
deposition, T. Paulmier, J. M. Bell, P. M. Fredericks,
Queensland Univ. of Technology (Australia) [6037-37]
14.10: Self-ordering of conjugated polymer on carbon
nanotube, R. G. Goh, Queensland Univ. of Technology (Australia)
[6037-38]
14.30: Nanosieves fabricated by interference lithography and
electroplating, L. E. Gutierrez-Rivera, E. J. Carvalho, M. A. da
Silva, L. H. D. Cescato, Univ. Estadual de Campinas (Brazil)
[6037-41]
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