MEMS
Academic (RF MEMS)
USA
University of Texas - Dallas, MiNDS Lab
University of Colorado Boulder RF MEMS
Georgia Institute of Technology MEMS
University of California at Berkeley Sensor & Actuator Center
University of California at Berkeley Microlab
Massachusetts Institute of Technology - MicroSystems Technology Lab
Carnegie Mellon University - MEMS Lab
University of California at Los Angeles MEMS
Case Western Reserve University MEMS Resource
University of Cincinati Bio MEMS
Stanford Nanofabrication Facility
Cornell Nanofabrication Facility
University of Michigan, MEMS exchange
University of Michigan, Radiation Laborator
University of Illinois at Urbana-Champaign, MASS Group
Asia
Seoul National University, Micro Sensors & Actuators Lab
KAIST
University of Tokyo, Fujita Laboratory
University of Tokyo, CIRMM
Tohoku University, Esashi Laboratory
Europe
Institute of Microtechnology (IMT), University of Neuchatel
Researches
National Nanofabrication Users Network
Canadian Microelectronics Corporation
Lawrence Berkley National Laboratory User Facilities
Sandia National Laboratories User Facility Program
DOE Shared Resources
Argonne National Lab User Facilities
Los Alamos National Laboratory User Facilities
Industry
MEMtronics
Discera
CFD Research Corp.
Links
The MEMS Clearinghouse
European Microsystems Technology Online
Dr. William Trimmer's MEMS site
IDA MEMS Technology Transition Site
The MEMS Exchange
The Microsystems Resource Centre
MEMS Sub-Division at ASME
The MEMS Exchange
Lab-on-a-chip
MEMS Industry Group
MEMSLeadership
World of MEMS
Danny Bank's Introduction to Microengineering
High-Tech Business
Tech Expo Online
Startup Zone
US Patent and Trademark Office
Intellectual Property Reference Library
Invention Master Resources List
Semiconductor
SemiResources
Intersil Semiconductor Dictionary
The Semiconductor Subway
Semiconductor International
SemiSeek
Semiconductor fabrication from Fullman Kinetics
News
NanoTechNews
Smalltimes
News at the MEMS Clearinghouse
Foresight Institute
Nanodot
Publications
Applied Physics Letters
Biomedical Microdevices
Journal of Applied Physics
Journal of Microelectromechanical Systems
Journal of Microlithography, Microfabrication, and Microsystems
Journal of Micromechanics and Microengineering
Journal of Micromechatronics
IEEE Sensors Journal
Journal of Physics D: Applied Physics
Micro Magazine
Microscale Thermophysical Engineering
Microsystem Technologies
Nanotechnology
Research and Development
Review of Scientific Instruments
Science
Sensors and Actuators A: Physical
Thin Solid Films
Smart Materials and Structures
Solid State Technology
Technology Review
The Virtual Journal of Nanoscale Science and Technology
Publishers
ASME - American Society of Mechanical Engineers
Springer
Kluwer Acdemic Publishers
AIP - American Institute of Physics
IEEE - Institute of Electrical and Electronics Engineers
SPIE - Society of Photo-Optical Instrumentation Engineers
IOP - Institute of Physics
VSP Scientific Publishers
Taylor and Francis
Cannon Communications
American Association for the Advancement of Science
American Institute of Physics
American Physical Society
Elsevier Science
Information
Argonne National Laboratory Internet Resource Listings
UIUC Electronics Reference Collection
NIST
NIST Online Database Gateway
NIST Physics Laboratory - Physical Reference Data
NIST Constants Reference
NIST Chemistry Workbook
WebElements Periodic Table
Chemdex Online Chemistry Dictionary
MatWeb
MIST Ceramics WebBook
University of Texas World Lecture Hall
Created by
J.C. Chiao