MEMS

Academic (RF MEMS)

• USA

• University of Texas - Dallas, MiNDS Lab
• University of Colorado Boulder RF MEMS
• Georgia Institute of Technology MEMS
• University of California at Berkeley Sensor & Actuator Center
• University of California at Berkeley Microlab
• Massachusetts Institute of Technology - MicroSystems Technology Lab
• Carnegie Mellon University - MEMS Lab
• University of California at Los Angeles MEMS
• Case Western Reserve University MEMS Resource
• University of Cincinati Bio MEMS
• Stanford Nanofabrication Facility
• Cornell Nanofabrication Facility
• University of Michigan, MEMS exchange
• University of Michigan, Radiation Laborator
• University of Illinois at Urbana-Champaign, MASS Group
• Asia
• Seoul National University, Micro Sensors & Actuators Lab
• KAIST
• University of Tokyo, Fujita Laboratory
• University of Tokyo, CIRMM
• Tohoku University, Esashi Laboratory
• Europe
• Institute of Microtechnology (IMT), University of Neuchatel

Researches

• National Nanofabrication Users Network
• Canadian Microelectronics Corporation
• Lawrence Berkley National Laboratory User Facilities
• Sandia National Laboratories User Facility Program
• DOE Shared Resources
• Argonne National Lab User Facilities
• Los Alamos National Laboratory User Facilities

Industry

• MEMtronics
• Discera
• CFD Research Corp.

Links

• The MEMS Clearinghouse
• European Microsystems Technology Online
• Dr. William Trimmer's MEMS site
• IDA MEMS Technology Transition Site
• The MEMS Exchange
• The Microsystems Resource Centre
• MEMS Sub-Division at ASME
• The MEMS Exchange
• Lab-on-a-chip
• MEMS Industry Group
• MEMSLeadership
• World of MEMS
• Danny Bank's Introduction to Microengineering

High-Tech Business

• Tech Expo Online
• Startup Zone
• US Patent and Trademark Office
• Intellectual Property Reference Library
• Invention Master Resources List

Semiconductor

• SemiResources
• Intersil Semiconductor Dictionary
• The Semiconductor Subway
• Semiconductor International
• SemiSeek
• Semiconductor fabrication from Fullman Kinetics

News

• NanoTechNews
• Smalltimes
• News at the MEMS Clearinghouse
• Foresight Institute
• Nanodot

Publications

• Applied Physics Letters
• Biomedical Microdevices
• Journal of Applied Physics
• Journal of Microelectromechanical Systems
• Journal of Microlithography, Microfabrication, and Microsystems
• Journal of Micromechanics and Microengineering
• Journal of Micromechatronics
• IEEE Sensors Journal
• Journal of Physics D: Applied Physics
• Micro Magazine
• Microscale Thermophysical Engineering
• Microsystem Technologies
• Nanotechnology
• Research and Development
• Review of Scientific Instruments
• Science
• Sensors and Actuators A: Physical
• Thin Solid Films
• Smart Materials and Structures
• Solid State Technology
• Technology Review
• The Virtual Journal of Nanoscale Science and Technology

Publishers

• ASME - American Society of Mechanical Engineers
• Springer
• Kluwer Acdemic Publishers
• AIP - American Institute of Physics
• IEEE - Institute of Electrical and Electronics Engineers
• SPIE - Society of Photo-Optical Instrumentation Engineers
• IOP - Institute of Physics
• VSP Scientific Publishers
• Taylor and Francis
• Cannon Communications
• American Association for the Advancement of Science
• American Institute of Physics
• American Physical Society
• Elsevier Science

Information

• Argonne National Laboratory Internet Resource Listings

• UIUC Electronics Reference Collection
• NIST
• NIST Online Database Gateway
• NIST Physics Laboratory - Physical Reference Data
• NIST Constants Reference
• NIST Chemistry Workbook
• WebElements Periodic Table
• Chemdex Online Chemistry Dictionary
• MatWeb
• MIST Ceramics WebBook
• University of Texas World Lecture Hall

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Created by J.C. Chiao