Conference 4593

Room: Terrace III · Monday-Wednesday 17-19 December 2001
Proceedings of SPIE Vol. #4593

Monday 17 December

Official Opening 8.15 to 9.10

Room: Terrace Ballroom

Monday Plenary Speakers 9.10 to 11.00

9.10 Novel Nano-organisms (Nanobes): Living Analogues for Martian "Nanobacteria"?, Philippa Uwins, Univ. of Queensland (Australia) [4590-01]

Coffee Break 9.50 to 10.10

10.10 Motility of Nanobes: Wider Perspective with Possible Technological Applications, Richard B. Hoover, NASA Marshall Space Flight Ctr. (USA) [4590-02]

SESSION 1

Room: Terrace III Mon.11:10

MOEMS I

Chair: Christine S. Grant, North Carolina State Univ. (USA)

11.10 Characterization of optical MEMS components for telecomm applications (Invited Paper), J. S. McKillop, JDS Uniphase (USA) [4593-01]

11.40 MEMS-based self-aligned modulated retroreflector, M. W. Roberson, C. K. Williams, MCNC (USA); L. J. McEllistrem, Univ. of Wisconsin/Eau Claire (USA); A. Huffman, S. Bonafede, MCNC (USA) [4593-02]

Noon: MOEM-based optical switch, M. R. Mackenzie, C. Y. Kwok, Univ. of New South Wales (Australia) [4593-03]

12.20 Comparison of free-space beam steering efficiency of scanning mode and diffractive mode micromirrors, M. Raisi, S. Ahderom, Edith Cowan Univ. (Australia) [4593-04]

Lunch Break 12.40 to 14.00

SESSION 2

Room: Terrace III Mon. 14.20

RF MEMS I

Chair: Mark W. Roberson, MCNC (USA)

14.20 Overview of RF MEMS (Invited Paper), A. S. Morris III, Coventor, Inc. (USA) [4593-05]

14.50 Novel self-assembly variable RF inductor, J. A. Herbsommer, D. O. Lopez, H. Safar, P. L. Gammel, Agere Systems (USA) [4593-06]

Refreshment Break 15.10 to 15.30

SESSION 3

Room: Terrace III Mon. 15.30

Microelectronics I

Chair: Michael Liebelt, Adelaide Univ. (Australia)

15.30 Coupling and quality factors in RFID (Invited Paper), P. H. Cole, Adelaide Univ. (Australia) [4593-08]

16.00 New architecture of fast parallel multiplier using fast parallel counter with FPA (first partial product addition), M. M. O. Lee, Dongshin Univ. (Korea) [4593-09]

16.20 Novel testing scheme for selection of capacitive fingerprint sensor LSIs, T. Shimamura, H. Morimura, H. Unno, K. Fujii, S. Shigematsu, NTT Lifestyle and Environmental Technology Labs. (Japan); K. Machida, H. Kyuragi, NTT Telecommunications Energy Labs. (Japan) [4593-10]

16.40 Low-power design using dynamic voltage scaling, L. Chandrasena, P. Chandrasena, M. Liebelt, Adelaide Univ. (Australia) [4593-11]

Tuesday 18 December

Plenary Presentation 8:30 to 9:10

Room: Terrace Ballroom

Biomimetic Visual Detection Based on Insect Neurobiology, David C. O'Carroll, Univ. of Washington (USA) and Adelaide Univ. (Australia) [4590-01]

SESSION 4

Room: Terrace III Tues. 09.10

Device Design and Characterization

Chair: Patrick J. French, Delft Univ. of Technology (Netherlands)

09.10 MEMS cantilever beam electrostatic pull-in model, G. O'Brien, Univ. of Michigan (USA); D. J. Monk, Motorola (USA); L. Lin, Univ. of California/Berkeley (USA) [4593-12]

09.30 Study of nonlinear electrostatic interactions in MEM resonant oscillators, R. Baskaran, K. L. Turner, Univ. of California/Santa Barbara (USA) [4593-13]

09.50 Design of low-cost resonant mode sensors, R. Kazinczi, J. R. Mollinger, A. Bossche, Delft Univ. of Technology (Netherlands) [4593-14]

Refreshment Break 10.10 to 10.40

10.40 Phase measurements of nonlinear response in MEMS oscillators, A. Olkhovets, M. Zalatutdinov, Cornell Univ. (USA); D. Carr, Lucent Technologies/Bell Labs. (USA); J. M. Parpia, H. G. Craighead, Cornell Univ. (USA) [4593-29]

11.00 Design considerations of the biaxial frequency-shifted microaccelerometer, Y. C. Lo, Synchrotron Radiation Research Ctr. (Taiwan); D. H. Hwang, K. Chin, National Chiao Tung Univ. (Taiwan) [4593-15]

11.20 Design and simulation of a novel micromachined vibratory gyroscope with enhanced sensitivity performance, Z. Wang, Institute of Microelectronics (Singapore); R. M. Lin, K. W. Leow, M. K. Lim, Nanyang Technological Univ. (Singapore); S. Uppilli, H. Feng, Institute of Microelectronics (Singapore) [4593-16]

11.40 Micromirror device for optical add/drop module, J. C. Chiou, Y. C. Lin, National Chiao Tung Univ. (Taiwan) [4593-17]

Lunch Break 12.00 to 14.00

SESSION 5

Room: Terrace III Tues. 14.00

MOEMS II

Chair: Victor M. Bright, Univ. of Colorado/Boulder (USA)

14.00 Design and characterization of a large-aperture near-infrared MEMS Fabry-Perot tunable filter, R. B. Barclay, M. A. Greenhouse, D. S. Schwinger, D. B. Mott, T. C. Chen, S. Satyapal, NASA Goddard Space Flight Ctr. (USA) [4593-18]

14.20 Design of a bistable compliant micromechanism for the application of optical switching devices, H. A. Chang, C. C. Huang, C. K. Sung, National Tsing Hua Univ. (Taiwan) [4593-19]

14.40 Design of an ultrasound torsional mirror array using Lorentz force, P. T. Liu, S. H. Shen, S. T. Tang, S. T. Young, National Yang-Ming Univ. (Taiwan); W. Fang, National Tsing Hua Univ. (Taiwan) [4593-20]

Refreshment Break 15.00 to 15.30

15.30 Monolithic fabrication of Rotman lenses, L. T. Hall, D. Abbott, Adelaide Univ. (Australia); H. Hansen, Defence Science and Technology Organisation (Australia) [4593-21]

15.50 Shape analysis of cylindrical micromirrors for angular focusing, T. K. Hou, National Tsing Hua Univ. (Taiwan) [4593-22]

16.10 Novel design and fabrication of Si optical bench, H. Choi, J. H. Kim, S. C. Kim, S. C. Kim, Y. S. Kim, B. C. Koh, Samsung Advanced Institute of Technology (Korea) [4593-23]

16.30 Effects of drive waveform on electrostatically actuated MEMS and MOEMS devices, M. W. Roberson, C. K. Williams, J. C. Swartz, J. E. Mancusi, A. Huffman, MCNC (USA) [4593-24]

Posters -Tuesday

Posters will be displayed in the Prefunction Area. Poster authors may set up their posters from 10.00 on for allday previewing. Poster presenters will stand by their posters from 17.30 to 19.00 to answer questions. Posters must be removed at the end of the poster session.

• Packaging of the RF-MEMS switch, H. W. Park, B. K. Ju, Korea Institute of Science and Technology (Korea) [4593-07]
• Force-deflection behavior of piezoelectric actuators, A. K. Singh, P. Nagpal, Institute of Armament Technology (India) [4593-38]
• Modeling of electromechanical forces in electrostatic microrelay with deformed anchor, N. I. Mukhurov, G. I. Efremov, A. Khodin, Institute of Electronics (Belarus) [4593-39]
• Investigation of stress in aluminum thin film for MEMS application, J. W. Shin, S. W. Chung, D. S. Shim, H. Shin, B. C. Koh, Samsung Advanced Institute of Technology (Korea) [4593-40]
• Novel through-wafer technique for interconnects, V. G. Kutchoukov, J. R. Mollinger, A. Bossche, Delft Univ. of Technology (Netherlands) [4593-41]
• Analytical study of microchannel and passive microdiode: application to micropump simulator, S. Bendib, O. Francais, Groupe ESIEE (France) [4593-42]
• Study of volumetric micropump with the help of electric analogy: application to the realization of an electrostatic valveless micropump used at its fluidic resonant frequency, O. Francais, S. Bendib, Groupe ESIEE (France) [4593-43]
• Design of the RF-MEMS voltage tunable capacitor for wide tunable range, S. Park, Y. Kim, Kyungpook National Univ. (Korea) [4593-44]
• Damping caused by the gas flow in the holes of perforated structures, H. Yang, Delft Univ. of Technology (Netherlands); M. Bao, Fudan Univ. (China); P. J. French, Delft Univ. of Technology (Netherlands) [4593-45]
• Mobility spectrum techniques for characterizing multilayer semiconductor structures, C. A. Musca, T. Nguyen, J. Antoszewski, D. A. Redfern, J. M. Dell, L. Faraone, Univ. of Western Australia (Australia) [4593-46]
• Detailed analysis and simulation of a MEMS ratchet, A. G. Allison, D. Abbott, Adelaide Univ. (Australia) [4593-48]

Wednesday 19 December

Plenary Presentation 8:30 to 9:10

Room: Terrace Ballroom

8.30 Micro-nanosystems by bulk silicon micromachining, M. Esashi, Tohoku Univ. (Japan) [4593-28]

SESSION 6

Room: Terrace III Wed. 09.10

MEMS Packaging and Design

Chair: Peter A. Sandborn, Univ. of Maryland/College Park (USA)

09.10 Modular MEMS: packaging and interfaces, M. Schuenemann, G. Bauer, A. Stock, Fraunhofer-Institut für Produktionstechnik und Automatisierung (Germany); K. A. Jam, Fraunhofer-Institut für Zuverlaessigkeit und Mikrointegration (Germany) [4593-25]

09.30 LIGA °V: a fabrication technology for industry? R. A. Lawes, G. G. Arthur, E. Huq, A. Schneider, Rutherford Appleton Lab. (UK) [4593-26]

09.50 Modeling and fabrication of a planar thin film airflow sensor, R. Adamec, Griffith Univ. (Austraila) [4593-27]

Refreshment Break 10.10 to 10.40

10.40 Thermal modeling of a MEMS for determination of fluid and flow characteristics, N. Damean, P. P. L. Regtien, Univ. Twente (Netherlands) [4593-28]

11.00 Simulation and optimization of micromachined gyroscope using high-aspect-ratio micromachining fabrication process, R. Y. Aiwu, G. Y. Chong, M. S. Tse, Nanyang Technological Univ. (Singapore) [4593-30]

Lunch Break 11.20to 14.00

SESSION 7

Room: Terrace III Wed. 14.00

RF MEMS II

Chair: Mona E. Zaghloul, George Washington Univ. (USA)

14.00 Electrically tunable micromachined inductors on silicon, K. J. Winchester, J. M. Dell, Univ. of Western Australia [4593-31]

14.20 High-Q RF inductors fabricated using WSP redistribution technology, Q. Ma, Q. Tran, Intel Corp.; J. W. Roeloffs, Coventor, Inc. (USA) [4593-32]

14.40 Design of rotating MEMS tunable capacitors for use at RF and microwave frequencies, J. M. Wilson, B. E. Duewer, D. A. Winick, D. P. Nackashi, P. D. Franzon, North Carolina State Univ. (USA) [4593-33]

Refreshment Break 15.00 to 15.30

SESSION 8

Room: Terrace III Wed. 15.30

Microelectronics II

Chair: Ronald A. Lawes, Rutherford Appleton Lab. (UK)

15.30 Massively parallel per-pixel based zerotree processing architecture for real-time video compression, G. Alagoda, A. M. Rassau, D. K. Lucas, K. Eshraghian, Edith Cowan Univ. (Australia) [4593-34]

15.50 Improved heuristics for optimal parallel multiplier synthesis, T. Townsend, M. Liebelt, Adelaide Univ. (Australia) [4593-35]

16.10 60Co gamma-irradiation-induced defects in MOCVD GaN, G. A. Umana-Membreno, J. M. Dell, G. Parish, L. Faraone, Univ. of Western Australia (Australia); U. K. Mishra, Univ. of California/Santa Barbara (USA) [4593-36]

16.30 Fully digital pixel readout architecture with a current-mode A/D converter, S. Lachowicz, K. Eshraghian, Edith Cowan Univ. (Australia) [4593-37]

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