Conference 5276
Room: Engineering Lecture Theatre 1
Wednesday-Friday 10-12 December 2003
Proceedings of SPIE Vol. #5276

Conference Chair: Jung-Chih Chiao, Univ. of Texas/Arlington (USA) Cochairs: Alex J. Hariz, Univ. of South Australia (Australia); David N. Jamieson, Univ. of Melbourne (Australia); Giacinta Parish, Univ. of Western Australia (Australia); Vijay K. Varadan, The Pennsylvania State Univ. (USA) Program Committee: David D. Awschalom, Univ. of California/Santa Barbara (USA); Simon A. Brown, Univ. of Canterbury (New Zealand); Carles Cané, Ctr. Nacional de Microelectrónica (Spain); Mu Chiao, Univ. of British Columbia (Canada); J. Allen Cox, Honeywell Inc. (USA); Nico F. de Rooij, Univ. de Neuchatel (Switzerland); Masayoshi Esashi, Tohoku Univ. (Japan); Joseph Ford, Optical Micro Machines, Inc. (USA); Hiroyuki Fujita, Univ. of Tokyo (Japan); Muralidhar K. Ghantasala, Swinburne Univ. of Technology (Australia); Frederic Green, Univ. of New South Wales (Australia); Klas Hjort, Uppsala Univ. (Sweden); Wensyang Hsu, National Chiao Tung Univ. (Taiwan); Yang-Tung Huang, National Chiao Tung Univ. (Taiwan); Jerome F. Jakubczak, Sandia National Labs. (USA); Chantal G. Khan Malek, Univ. Paris-Sud (France); Eun S. Kim, Univ. of Southern California (USA); Harri K. Kopola, VTT Electronics (Finland); Youngwoo Kwon, Seoul National Univ. (South Korea); Rongming Lin, Nanyang Technological Univ. (Singapore); Victor M. Lubecke, Univ. of Hawaii at Manoa (USA); Karen Markus, JDS Uniphase Corp. (USA); Jose Mireles, Univ. of Texas/Arlington (USA); Koji Mizuno, Tohoku Univ. (Japan); Sangeneni Mohan, Indian Institute of Science (India); Ash M. Parameswaran, Simon Fraser Univ. (Canada); Gabriel M. Rebeiz, Univ. of Michigan/Ann Arbor (USA); Kazuo Sato, Nagoya Univ. (Japan); Jun-Hwan Sim, Korea Maritime Univ. (South Korea); Dinesh K. Sood, RMIT Univ (Australia); Ooi Kiang Tan, Nanyang Technological Univ. (Singapore); Vasundara V. Varadan, National Science Foundation (USA); Steve J. Walker, Integrated Micromachines Inc. (USA); Sai-Peng Wong, Chinese Univ. of Hong Kong (Hong Kong); Huikai Xie, Univ. of Florida (USA); Roland Zengerle, Albert-Ludwigs-Univ. (Germany)

Wednesday 10 December

SESSION 1

Room: Engineering Lecture Theatre 1 Wed. 11.00 to 12.30

Materials I

Chairs: John M. Dell, Univ. of Western Australia (Australia); Nico F. de Rooij, Univ. de Neuchatel (Switzerland)

11.00: Few and single ion implantation for the construction of buried nanostructures in silicon with applications to quantum computation (Invited Paper), D. N. Jamieson, Univ. of Melbourne (Australia); A. S. Dzurak, Univ. of New South Wales (Australia) [5276-01]

11.30: Fabrication of micromachined ceramic thin-film type pressure sensors for overpressure tolerance and its characteristics, G. Chung, J. Kim, Dongseo Univ. (South Korea) [5276-02]

11.45: Ferromagnetism in transition metal-implanted titanium dioxide films, S. Wong, Y. Gao, K. H. Cheng, N. Ke, W. Y. Cheung, Q. Li, Chinese Univ. of Hong Kong (China) [5276-03]

12.00: Use of titanium and titanium dioxide as masks for deep silicon etching, O. J. Powell, Griffith Univ. (Australia); H. B. Harrison, Griffith Univ. (Australia) and CRC for Microtechnology (Australia); D. Sweatman, Griffith Univ. (Australia) [5276-04]

12.15: Laser patterning of thin films of TiNiPd deposited on silicon substrate, V. K. Mathe, D. K. Sood, RMIT Univ. (Australia) and CRC for Microtechnology (Australia); J. P. Hayes, Swinburne Univ. of Technology (Australia) and CRC for Microtechnology (Australia) [5276-05]

Lunch Break 12.30 to 13.30

SESSION 2

Room: Engineering Lecture Theatre 1 Wed. 13.30 to 15.00

Characterization II

Chairs: Peter J. Evans, Australian Nuclear Science and Technology Organisation (Australia); Brett D. Nener, Univ. of Western Australia (Australia)

13.30: Investigations of ohmic contacts to p-GaN (Invited Paper), G. Parish, G. Umana-Membreno, B. D. Nener, Univ. of Western Australia (Australia) [5276-06]

14.00: Micro- to nano-domain engineering of LN and LT for new applications, K. Kitamura, M. Nakamura, S. Kurimura, K. Terabe, National Institute for Materials Science (Japan) [5276-80]

14.15: Loop closure theory in deriving a linear and simple kinematic model for a 3 DOF parallel micromanipulator, Y. K. Yong, T. Lu, D. C. Handley, Univ. of Adelaide (Australia) [5276-08]

14.30: Simple and efficient dynamic model for a compliant micropositioning mechanism using flexure hinges, D. C. Handley, T. Lu, Y. K. Yong, Univ. of Adelaide (Australia); C. Zhang, Univ. of Saskatchewan (Canada) [5276-09]

14.45: Performance of a novel non-planar diaphragm and its applications to high-performance devices, W. Wang, Nanyang Technological Univ. (Singapore) [5276-10]

Afternoon Tea 15.00 to 15.30

SESSION 3

Room: Engineering Lecture Theatre 1 Wed. 15.30 to 16.45

Fabrication I

Chairs: Alex J. Hariz, Univ. of South Australia (Australia); Charles A. Musca, Univ. of Western Australia (Australia)

15.30: Investigation of SU-8 resist adhesion in deep x-ray lithography of high aspect ratio structures, R. L. Barber, M. K. Ghantasala, Swinburne Univ. of Technology (Australia); R. S. Divan, D. C. Mancini, Argonne National Lab. (USA); E. C. Harvey, Swinburne Univ. of Technology (Australia) [5276-11]

15.45: Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication, E. C. Harvey, J. Hayes, Swinburne Univ. of Technology (Australia) and CRC for MicroTechnology (Australia) [5276-12]

16.00: Manufacturing microdroplet generators with laser-LIGA technique, J. Husny, Univ. of Melbourne (Australia); H. Jin, E. Harvey, Swinburne Univ. of Technology (Australia); J. J. Cooper-White, Univ. of Melbourne (Australia) [5276-13]

16.15: Quartz crystal microbalance coated with protein self assembly layer to detect organic gases, M. Mat Salleh, A. Ali Umar, Univ. Kebangsaan Malaysia (Malaysia) [5276-14]

16.30: Design, modeling, and fabrication of piezoelectric polymer actuators, Y. Fu, E. C. Harvey, M. K. Ghantasala, Swinburne Univ. of Technology (Australia); G. Spinks, Univ. of Wollongong (Australia) [5276-15]

Thursday 11 December

Morning Tea 10.30 to 11.00

SESSION 4

Room: Engineering Lecture Theatre 1 Thurs. 11.00 to 12.30

Fabrication II

Chairs: Erol C. Harvey, Swinburne Univ. of Technology (Australia); Giacinta Parish, Univ. of Western Australia (Australia)

11.00: Novel low temperature CMOS compatible Full wafer bonding process for the fabrication of 3D embedded microchannels using SU-8 photoresist (Invited Paper), F. J. Blanco, IKERLAN S. Koop (Spain) [5276-17]

11.30: Secret of formulating a selective etching or cleaning solution for boron nitride (BN) thin film, W. C. Hui, Institute of Microelectronics (Singapore) [5276-18]

11.45: Comparison of two types of multilayer microcoil fabrication techniques, A. C. Hartley, R. E. Miles, J. Corda, Univ. of Leeds (United Kingdom) [5276-19]

12.00: Patterning of SU-8 resist structures using CF4, K. D. Vora, M. K. Ghantasala, Swinburne Univ. of Technology (Australia); A. Holland, A. Mitchell, RMIT Univ. (Australia) [5276-20]

12.15: Novel fabrication of 3D silicon photonic crystal structures using conventional micromachining technology, S. Venkataraman, J. Murakowski, G. Schneider, D. Prather, Univ. of Delaware (USA) [5276-21]

Lunch Break 12.30 to 13.30

SESSION 5

Room: Engineering Lecture Theatre 1 Thurs. 13.30 to 15.00

Materials II

Chairs: David N. Jamieson, Univ. of Melbourne (Australia); Charles A. Musca, Univ. of Western Australia (Australia)

13.30: Cooling a nanomechanical resonator using feedback: toward quantum behavior (Invited Paper), K. A. Jacobs, Griffith Univ. (Australia); A. Hopkins, California Institute of Technology (USA) and Los Alamos National Laboratory (USA); S. Habib, Los Alamos National Lab. (USA); K. Schwab, Univ. of Maryland (USA) [5276-22]

14.00: Characterization of thin metal oxide films grown by atomic layer deposition, P. J. Evans, K. Prince, G. Triani, K. Finnie, C. Barbe, Australian Nuclear Science and Technology Organisation (Australia) [5276-23]

14.15: Quantum electromechanical system (QEMS), D. Wahyu Utami, H. Goan, G. J. Milburn, Univ. of Queensland (Australia) [5276-24]

14.30: Encapsulation of nanoparticles for the manufacture of solid state lighting devices, S. G. Thoma, J. Wilcoxon, L. Rohwer, Sandia National Labs. (USA); D. Devlin, Los Alamos National Lab. (USA); S. Woessner, B. Abrams, A. Sanchez, Sandia National Labs. (USA) [5276-25]

14.45: Selective wet etching of fully filtered and partially filtered cathodic arc deposited TiN films, A. J. Dowling, M. Ghantasala, Swinburne Univ. of Technology (Australia); D. Doyle, Swinburne Univ. of Technology (Australia) and Surface Technology Coatings (Australia); E. Harvey, Swinburne Univ. of Technology (Australia) and MiniFab (Australia) [5276-26]

Afternoon Tea 15.00 to 15.30

SESSION 6

Room: Engineering Lecture Theatre 1 Thurs. 15.30 to 17.00

Characterization II

Chairs: H. Barry Harrison, Griffith Univ. (Australia); Brett D. Nener, Univ. of Western Australia (Australia)

15.30: MEMS micromirrors for optical switching in multichannel spectrophotometers, A. Tuantranont, T. Lomas, National Electronic and Computer Technology Ctr. (Thailand); V. M. Bright, Univ. of Colorado/Boulder (USA) [5276-27]

15.45: Phase detection scheme for an angular rate sensor, J. D. John, T. Vinay, L. Qin, RMIT Univ. (Australia) [5276-28]

16.00: Influence of synthetic jet location on boundary layer separation control, C. Lee, G. Hong, Univ. of Technology/Sydney (Australia); S. Mallinson, Silverbrook Research (Australia) [5276-60]

16.15: Large output force out-of-plane MEMS actuator array, T. Fukushige, S. Hata, A. Shimokohbe, Tokyo Institute of Technology (Japan) [5276-30]

16.30: Single-spin measurement by magnetic resonance force microscopy: effects of measurement device, thermal noise, and spin relaxation, H. Goan, Univ. of New South Wales (Australia); T. A. Brun, Institute for Advanced Study (USA) [5276-31]

16.45: Anodic bond characteristics of Si-wafer and MLCA using Pyrex #7740 glass intermediate layer, G. Chung, J. Kim, Dongseo Univ. (South Korea) [5276-32]

Posters -Thursday

Posters will be displayed all day Thursday. Poster presenters will stand by their posters from 17.00 to 18.30 pm to answer questions. Posters must be removed at the end of the poster session.

• Two-way actuation of bilayer cantilever of nickel titanium and silicon nitride thin films by shape memory effect and stress relaxation, E. Wibowo, C. Y. Kwok, N. Lovell, Univ. of New South Wales (Australia) [5276-44]
• Electrostatic microrelays with adjustable parameters, N. I. Mukhurov, G. I. Efremov, Institute of Electronics (Belarus) [5276-45]
• Identification and elimination of trench crystal defects in sub-0.13-um era, C. Yeh, C. Chen, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) [5276-46]
• Lens design issues for the optical structure of a holographic free space optical switch, K. Lo, D. Habibi, Edith Cowan Univ. (Australia) [5276-47]
• Fabrication of thin-film transistors on plastic substrates by spin etching and device transfer process, S. Wang, C. Hsu, C. Yeh, J. Lou, National Chiao Tung Univ. (Taiwan) [5276-48]
• New unidirectional interdigital transducers using very thin grating acoustic surface wave substrates and application to wideband low loss filters, K. Yamanouchi, Y. Sato, Tohoku Institute of Technology (Japan) [5276-49]
• Comprehensive analysis of InGaP/GaAs heterojunction bipolar transistors (HBTs) with different thickness of setback layers, S. Cheng, Oriental Institute of Technology (Taiwan); C. Chun-Yuan, J. Chen, H. Chuang, W. Liu, National Cheng Kung Univ. (Taiwan) [5276-50]
• Mass-productive fabrication method for miniaturized plastic chip devices used in biochemical applications, T. Fujimura, S. Etoh, A. Ikeda, R. Hattori, Y. Kuroki, Kyushu Univ. (Japan) [5276-51]
• Formation and its characteristics of PLZT layered film structure for transducer, M. Ichiki, National Institute of Advanced Industrial Science and Technology (Japan) and Tokyo Denki Univ. (Japan); T. Kobayashi, Y. Morikawa, National Institute of Advanced Industrial Science and Technology (Japan); T. Nakada, Tokyo Denki Univ. (Japan); R. Maeda, National Institute of Advanced Industrial Science and Technology (Japan) [5276-52]
• Apparent positive resistance and temperature effect on I-V characteristics of RTD, W. Guo, P. Niu, X. Li, Z. Xu, H. Li, C. Miao, Tianjin Polytechnic Univ. (China) [5276-53]
• Preparation of PZT films derived by hybrid processing for MEMS application, Z. J. M. Wang, L. Yan, Tohoku Univ. (Japan); R. Maeda, National Institute of Advanced Industrial Science and Technology (Japan); H. Kokawa, Tohoku Univ. (Japan) [5276-54]
• Analysis of beam propagation and aberration effects in a holographic free space optical switch, K. Lo, D. Habibi, Edith Cowan Univ. (Australia) [5276-55]
• Development of electrochromic sensor using iron-tetraphenyl porphyrins thin films to detect chlorine, M. B. Yahaya, Univ. Kebangsaan Malaysia (Malaysia) [5276-56]
• High aspect ratio fabrications of micro journal bearings and microvertical mirrors, X. C. Shan, Singapore Institute of Manufacturing Technology (Singapore) and AIST (Japan); R. Maeda, National Institute of Advanced Industrial Science and Technology (Japan) [5276-57]
• Dynamic characteristics of piezoelectric shear deformable composite plates, R. Kolar, Naval Postgraduate School (USA) [5276-58]
• Mechanical and optical properties of low temperature PECVD silicon nitride thin films, M. T. Soh, Univ. of Western Australia (Australia) [5276-59]
• Novel bistable thermally actuated snap-through actuator for out of plane deflection, K. Yu, A. Michael, C. Y. Kwok, Univ. of New South Wales (Australia) [5276-61]
• Modeling and simulation of porous microcantilevers, G. M. Klass, RMIT Univ. (Australia) [5276-62]
• Investigation of residual stress in low temperature silicon nitride thin films using diagnostic microstructures, M. P. Martyniuk, J. Antoszewski, J. G. Wehner, C. A. Musca, J. M. Dell, L. Faraone, Univ. of Western Australia (Australia) [5276-63]
• Novel 2D MEMS-based optical crossconnect with greatly reduced complexity, X. Ma, Beijing Univ. of Posts and Telecommunications (China); G. Kuo, National Chengchi Univ. (Taiwan) [5276-64]
• New method of vibration isolation of scanning electron microscope, K. Matsuda, Y. Kanemitsu, S. Kijimoto, Kyushu Univ. (Japan) [5276-65]
• Area-changed capacitive accelerometer using 3-mask fabrication process, Y. M. Burhanuddin, B. Badariah, T. A. Santoso, Univ. Kebangsaan Malaysia (Malaysia) [5276-66]
• Micromachined crystal plane on (100) and (110) silicon for reflective mirror applications, D. Resnik, Univ. v Ljubljani (Slovenia) [5276-67]
• Development of surface connectors for microfluidic systems, T. C. Liu, Swinburne Univ. of Technology (Australia) [5276-68]
• Down conversion of high energy in anatase based TiO2 solar cells, H. J. Kim, J. S. Song, B. K. Koo, D. Y. Lee, W. J. Lee, J. H. Koh, Korea Electrotechnology Research Institute (South Korea) [5276-70]
• The MEMS components for front end of direct conversion architecture, V. J. Vibhute, J. Singh, A. Stojcevski, A. Zayegh, Victoria Univ. of Technology (Australia) [5276-71]
• Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror, T. Kobayashi, J. Tsaur, M. Ichiki, R. Maeda, National Institute of Advanced Industrial Science (Japan) [5276-72]
• Microhot embossing for high aspect ratio used thin polymer sheet, Y. Murakoshi, National Institute of Advanced Industrial Science and Technology (Japan); X. Shan, Singapore Institute of Manufacturing Technology (Singapore); T. Sano, Chiba Institute of Technology (Japan); M. Takahashi, R. Maeda, National Institute of Advanced Industrial Science and Technology (Japan) [5276-73]
• MEMS RF-filter for superheterodyne down conversion receivers, H. H. Pham, J. Chaffey, RMIT Univ. (Australia) [5276-74]
• Initially buckled, thermally actuated, and snapping bimorph microbridge, A. M. Michael, K. Yu, K. Y. Chee, Univ. of New South Wales (Australia) [5276-75]
• Micro/nanomechanical characterization of PECVD fluorocarbon thin film and its application in nanostructure fabrication, T. Kim, N. Kim, J. Park, Hanyang Univ. (South Korea); E. Lee, Korea Institute of Machinery and Materials (South Korea) [5276-76]
• Modeling mobility degradation in scanning capacitance microscopy for semiconductor dopant profile measurement, Y. D. Hong, Y. T. Yeow, Univ. of Queensland (Australia) [5276-77]
• Finite element modeling of micro-electro-mechanical systems incorporating shape memory alloys, M. Y. Ahmed, Univ. of Alberta (Canada) and Alberta Ingenuity Fund (Canada); W. A. Moussa, Univ. of Alberta (Canada) [5276-78]
• Three-dimensional numerical study of steady and pulsed jet/boundary layer interactions, S. G. Mallinson, Silverbrook Research (Australia); G. Johnson, Univ. of Nottingham (United Kingdom); G. Hong, M. Gaston, Univ. of Technology/Sydney (Australia) [5276-29]
• Micro- to nano-domain engineering of LN and LT for new applications, K. Kitamura, M. Nakamura, S. Kurimura, K. Terabe, National Institute for Materials Science (Japan) [5276-80]
• Surface metalization on the photo-emission, photo-absorption and core-level shift of nanosolid silicon, C. Sun, L. Pan, S. Li, B. Tay, C. Tan, Nanyang Technological Univ. (Singapore) [5276-33]

Friday 12 December

Morning Tea 10.30 to 11.00

SESSION 7

Room: Fri. 11.00 to 12.15

Fabrication III

Chairs: Giacinta Parish, Univ. of Western Australia (Australia); John M. Dell, Univ. of Western Australia (Australia)

11.00: Wireless MEMS and microsystem for monitoring and control of Parkinson's disease and sleeping disorders, V. K. Varadan, The Pennsylvania State Univ. (USA) [5276-79]

11.15: How to prevent a run away chemical reaction in the isotropic etching of silicon with HF/HNO3/CH3COOH or HNA solution, W. C. Hui, Institute of Microelectronics (Singapore) [5276-34]

11.30: Study on features of silicon microtrench with inductively coupled plasma etcher, S. Tietun, Nanyang Technological Univ. (Singapore) [5276-35]

11.45: Reflowed sol-gel microlens for coupling a laser diode and a single-mode fiber with high efficiency: a cost-effective and high-volume fabrication solution, M. He, X. Yuan, Q. N. Ngo, J. Bu, S. Tao, Nanyang Technological Univ. (Singapore) [5276-36]

12.00: Investigation of sample behavior inside on-chip electrophoresis microcapillary using confocal laser scanning microscopy, S. Etoh, T. Higashi, T. Fujimura, R. Hattori, Y. Kuroki, Kyushu Univ. (Japan) [5276-37]

Lunch Break 12.15 to 13.30

SESSION 8

Room: Engineering Lecture Theatre 1 Fri. 13.30 to 14.30

Fabrication IV

Chairs: Kurt A. Jacobs, Griffith Univ. (Australia); Mu Chiao, Univ. of British Columbia (USA)

13.30: Atomic Layer Deposition (ALD) of TiO2 and Al2O3 Thin Films on Silicon, D. R. G. Mitchell, G. Triani, D. J. Attard, K. S. Finnie, ANSTO Materials (Australia); P. J. Evans, ANSTO Environment (Australia); C. J. Barbé, J. R. Bartlett, ANSTO Materials (Australia) [5276-38]

13.45: LIGA for Boomerang, R. A. Lawes, Rutherford Appleton Lab. (United Kingdom) [5276-39]

14.00: Optically variable devices fabricated by electron beam lithography, G. C. Rosolen, CSIRO (Australia) [5276-41]

14.15: Bi-Ti-O thin films for pressure sensors, C. W. Chong, M. Yahaya, M. Mat Salleh, Univ. Kebangsaan Malaysia (Malaysia) [5276-42]

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