Conference Final Program
Smart Sensors, Actuators and MEMS
VLSI Circuits and Systems
Nanotechnology
Bioengineered and Bioinspired Systems

SPIE International Symposium on Microtechnologies for the New Millennium 2003

Advance Program

May 19-21, 2003
San Agustín, Gran Canaria, Spain
2003 Symposium Chairs:
José Fco. López, University of Las Palmas de Gran Canaria, Spain
Derek Abbott, The The University of Adelaide, Australia

Conference 1: Smart Sensors, Actuators and MEMS

Chair Jung-Chih Chiao, University of Texas - Arlington (USA)
Co-Chairs Vijay K. Varadan, The Pennsylvania State University (USA)
Carles Cané, Centro Nacional de Microelectrónica (Spain)
Topics
  • Micromachining and nanomachining materials, biomaterials, smart materials, polymer materials, and material processing techniques
  • MEMS and NEMS devices and components: sensors, actuators, microaccelerometers, gyroscopes, RF MEMS, microwave, millimeter/submillimeter-wave and infrared devices, pressure, vibration and mechanical sensors, micromotors, optical MEMS (MOEMS), photonic bandgap materials and devices, PZT and piezoelectric thin-film devices, chemical sensors, biosensors, lab-on-the-chip biodevices, DNA arrays, microfluidic devices, flexible MEMS, and polymer MEMS
  • MEMS manipulation of biomolecules and cells
  • Fabrication techniques, photolithography, etching and deposition technologies, LIGA, hybrid material fabrication, laser micromachining, and microstereolithography
  • MEMS and electronic integration, photonic/chemical/biological processors, CMOS integration CAD, modeling, and simulation tools for MEMS and NEMS
  • Packaging and assembly
  • Calibration, characterization, and testing techniques
  • MEMS reliability, stability, and quality issues
  • Metrology, interface, and control for MEMS and NEMS
  • MEMS and NEMS applications
  • Smart microsystems
Program
Committee		 Jin-Chern Chiou, Chiao-Tung University (Taiwan);
Masayoshi Esashi, Tohoku University (Japan);
Carles Ferrer, Centro Nacional de Microelectrónica (Spain);
Hiroyuki Fujita, University of Tokyo (Japan);
Kazuhiro Hane, Tohoku University (Japan);
Klas Hjort, Uppsala University (Sweden);
Wen-Syang Hsu, Chiao-Tung University (Taiwan);
Jay Jakubczak, Sandia National Laboratories (USA);
Meng-Hsiung Kiang, ONIX Microsystems (USA);
Eun Sok Kim, University of Southern California (USA);
Jeong-Bong (J.B). Lee, University of Texas - Dallas (USA);
Liyuan Lin (USA);
Liwei Lin, University of California at Berkeley (USA);
Michael Little, Solus Technologies (USA);
Victor Lubecke, Bell Labs, Lucent Technologies (USA);
Chantal Khan Malek, National Centre for Scientific Research (France);
Dean Neikirk, University of Texas - Austin (USA);
Ash M. Parameswaran, Simon Fraser University (Canada);
Nico F. de Rooij, University of Neuchatel (Switzerland);
Hans Siegenthaler, Universitat Bern (Switzerland);
Mike Sinclair, Microsoft (USA);
Roland Zengerle, Albert-Ludwigs University Freiburg (Germany).

Created by J.C. Chiao