12–15 December 2004, Sydney, Australia

Conferences

MICRO-ANDNANOTECHNOLOGY: MATERIALS, PROCESSES, PACKAGING, AND SYSTEMS II

Conference 5650
Room: BioMed Lecture Theatre C
Monday-Wednesday 13-15 December 2004
Proceedings of SPIE Vol. #5650

Conference Chair: Jung-Chih Chiao, Univ. of Texas/ Arlington

Cochairs: David N. Jamieson, Univ. of Melbourne (Australia); Lorenzo Faraone, Univ. of Western Australia (Australia); Andrew S. Dzurak, Univ. of New South Wales (Australia)

Program Committee: Simon A. Brown, Univ. of Canterbury (New Zealand); Mu Chiao, Univ. of British Columbia (Canada); Robert G. Clark, Univ. of New South Wales (Australia); Nicolaas F. de Rooij, Univ. de Neuchâtel (Switzerland); John M. Dell, Univ. of Western Australia (Australia); Masayoshi Esashi, Tohoku Univ. (Japan); Bradley Ferguson, Tenix Systems Pty. Ltd. (Australia); Paul D. Franzon, North Carolina State Univ. (USA); Hiroyuki Fujita, Univ. of Tokyo (Japan); Thomas George, Jet Propulsion Lab. (USA); Katia M. Grenier, LAAS-CNRS (France); Kazuhiro Hane, Tohoku Univ. (Japan); Alex J. Hariz, Univ. of South Australia (Australia); Erol C. Harvey, Swinburne Univ. of Technology (Australia); Hng Huey Hoon, Nanyang Technological Univ. (Singapore); Wensyang Hsu, National Chiao Tung Univ. (Taiwan); Kohei M. Itoh, Keio Univ. (Japan); Chennupati Jagadish, The Australian National Univ. (Australia); Chantal G. Khan-malek, CNRS (France); Yong-Hyup Kim, Seoul National Univ. (South Korea); Laszlo B. Kish, Texas A&M Univ. (USA); Ronald A. Lawes, Rutherford Appleton Lab. (United Kingdom); Liwei Lin, Univ. of California/Berkeley (USA); Cheng-Hsien Liu, National Tsing Hua Univ. (Taiwan); Victor M. Lubecke, Univ. of Hawaii/Manoa (USA); Meyya Meyyappan, NASA Ames Research Ctr. (USA); Samuel P. Mickan, The Univ. of Adelaide (Australia); Sangeneni Mohan, Indian Institute of Science (India); Ash M. Parameswaran, Simon Fraser Univ. (Canada); Giacinta Parish, Univ. of Western Australia (Australia); Olaf Reinhold, Defence Science and Technology Organisation (Australia); Olivia M. Samardzic, Defense Science and Technology Organization (Australia); Kazuo Sato, Nagoya Univ. (Japan); Michael J. Sinclair, Microsoft Corp. (USA); Dinesh K. Sood, RMIT Univ. (Australia); Yu-Chuan Su, National Tsing Hua Univ. (Taiwan); Hitoshi Tabata, Osaka Univ. (Japan); Hark Hoe Tan, The Australian National Univ. (Australia); Ooi Kiang Tan, Nanyang Technological Univ. (Singapore); Vasundara V. Varadan, National Science Foundation (USA); Sai Peng Wong, Chinese Univ. of Hong Kong (Hong Kong China); Huikai Xie, Univ. of Florida (USA)

Monday 13 December

Mathews Lecture Theatre A

9.00 Opening Remarks

9.30-10.15 Plenary Presentation: Advances in Silicon Quantum Computing, Robert G. Clark, Director, Ctr. for Quantum Computing Technology, Univ. of New South Wales (Australia)

10.15-10.45 Morning Tea

SESSION 1

Room: BioMed Lecture Theatre C Mon. 10.45 to 12.15

Photonics and Applications

Chairs: Mike Gal, Univ. of New South Wales (Australia); Jung-Chih Chiao, Univ. of Texas/Arlington (USA)

10.45: Microshutter arrays for James Webb space telescope (Invited Paper), M. J. Li, N. Acuna, M. Beamesderfer, S. Babu, S. Bajikar, A. Ewin, R. Fettig, D. Franz, L. Hess, M. Jhabvala, D. Kelly, T. King, G. Kletetschka, C. Kotecki, A. Kutyrev, B. Lynch, H. Moseley, B. Mott, L. Oh, D. Rapchun, C. Ray, C. Sappington, W. Smith, S. Snodgrass, R. Steptoe-Jackson, L. Wang, Y. Zheng, C. Zincke, NASA Goddard Space Flight Ctr. (USA) [5650-01]

11.15: Structures and light emitting properties of ion beam synthesized FeSi2 in silicon, C. F. Chow, S. P. Wong, Y. Gao, N. Ke, Q. Li, W. Y. Cheung, Chinese Univ. of Hong Kong (Hong Kong China); G. Shao, K. P. Homewood, Univ. of Surrey (United Kingdom) [5650-02]

11.30: Self-assembly photonic crystals from the air-liquid interface, C. Chen, National Central Univ. (Taiwan) [5650-03]

11.45: Causes and nature of diameter variations along optical fiber, S. H. Law, G. W. Barton, T. N. Phan, Univ. of Sydney (Australia) [5650-04]

12.00: Micro and nanosystem packaging challenges and opportunities, R. Mehalso, Microtec Associates (USA) [5650-05]

Lunch Break 12.15 to 13.30

SESSION 2

Room: BioMed Lecture Theatre C Mon. 13.30 to 15.15

Nanotechnology

Chairs: Michelle Y. Simmons, Univ. of New South Wales (Australia); Andrew S. Dzurak, Univ. of New South Wales (Australia)

13.30: Large scale fabrication and functionalization of carbon nanocoil, nanotube and microcoil and their application in engineering and medicine (Invited Paper), V. K. Varadan, The Pennsylvania State Univ. (USA) [5650-07]

14.00: Surface modification of silicon nano mechanical structures by carbon ion implantation for post-fabrication transformation to silicon carbide, A. P. Malshe, K. R. Virwani, W. F. Schmidt, Univ. of Arkansas/Fayetteville (USA); D. K. Sood, RMIT Univ. (Australia); R. G. Elliman, The Australian National Univ. (Australia) [5650-08]

14.15: Quantitative estimate on the interaction between microstructure and elastic properties of carbon nanotubes, N. Yu, Z. H. Zhang, Yuan Ze Univ. (Taiwan) [5650-09]

14.30: Formation of diamond nanocrystals by implantation of keV carbon ions in fused silica followed by thermal annealing, P. Olivero, S. D. Prawer, D. N. Jamieson, J. C. McCallum, J. L. Peng, A. Liu, P. Reichart, Univ. of Melbourne (Australia); S. P. Lau, B. Tay, J. Y. Sze, Nanyang Technological Univ. (Singapore) [5650-10]

14.45: Physics of carbon nanotubes and its applications as a memory device, S. Natarajan, A. Alvandpour, Linköping Univ. (Sweden) [5650-11]

15.00: Fast donor based electron spin quantum computing, C. D. Hill, Univ. of Queensland (Australia); L. C. L. Hollenberg, A. G. Fowler, C. J. Wellard, A. D. Greentree, Univ. of Melbourne (Australia); H. Goan, Univ. of New South Wales (Australia) and Univ. of Queensland (Australia) [5650-12]

Afternoon Tea 15.15 to 15.45

SESSION 3

Room: BioMed Lecture Theatre C Mon. 15.45 to 17.15

Quantum Computing

Chairs: Andrew S. Dzurak, Univ. of New South Wales (Australia); Michelle Y. Simmons, Univ. of New South Wales (Australia)

15.45: Nanofabrication of charge-based Si:P quantum computer devices using single-ion implantation, M. Mitic, T. M. Buehler, V. C. Chan, A. J. Ferguson, S. E. Andresen, E. Gauja, F. E. Stanley, D. J. Reilly, A. R. Hamilton, A. S. Dzurak, R. G. Clark, Univ. of New South Wales (Australia); C. Yang, T. Hopf, C. I. Pakes, D. N. Jamieson, Univ. of Melbourne (Australia) [5650-13]

16.00: Optimization of single keV phosphorus ion implantation and online detection for silicon quantum-bit construction, C. Yang, Univ. of Melbourne (Australia) and Ctr. for Quantum Computer Technology (Australia); D. N. Jamieson, T. Hopf, C. I. Pakes, G. Tamanyan, S. M. Hearne, S. D. Prawer, Univ. of Melbourne (Australia); A. S. Dzurak, F. E. Stanley, S. E. Andresen, Univ. of New South Wales (Australia); P. Spizziri, Univ. of Melbourne (Australia); E. Gauja, R. G. Clark, Univ. of New South Wales (Australia) [5650-14]

16.15: All-electrical adiabatic passage techniques in solid-state coherent quantum systems, A. D. Greentree, J. H. Cole, Univ. of Melbourne (Australia); A. R. Hamilton, L. C. L. Hollenberg, Univ. of New South Wales (Australia) [5650-15]

16.30: Development of NiFe micro magnet stripes for solid-state NMR quantum computing, A. Takahashi, Keio Univ. (Japan) and CREST-JST (Japan); D. F. Wang, Ishimaki Sensyu Univ. (Japan) and CREST-JST (Japan); Y. Matsumoto, K. M. Itoh, Keio Univ. (Japan) and CREST-JST (Japan) [5650-16]

16.45: Single-electron transistor coupled to a silicon nano-MOSFET, V. C. Chan, D. R. McCamey, A. J. Ferguson, T. M. Buehler, D. J. Reilly, Univ. of New South Wales (Australia); C. Yang, T. Hopf, S. M. Hearne, Univ. of Melbourne (Australia); E. Gauja, A. S. Dzurak, A. R. Hamilton, Univ. of New South Wales (Australia); D. N. Jamieson, S. D. Prawer, Univ. of Melbourne (Australia); R. G. Clark, Univ. of New South Wales (Australia) [5650-17]

17.00: Exchange in phosphorus donor spin based quantum computers, C. J. Wellard, L. C. L. Hollenberg, Univ. of Melbourne (Australia) [5650-18]

Tuesday 14 December

Mathews Lecture Theatre A

8.30 to 9.15 Plenary Presentation: Biological Path to Nanoelectronic Devices, Ichiro Yamashita, Advanced Technology Research Labs., Panasonic (Japan)

9.15 to 10.00 Plenary Presentation: Recent Developments in Smart Structures and MEMS in India: Fruits of National Initiatives, A. R. Upadhya, Aeronatuical Development Agency (India)

10.00 to 10.30 Morning Tea

SESSION 4

Room: BioMed Lecture Theatre C Tues. 10.30 to 12.00

Photonics

Chairs: Sai Peng Wong, Chinese Univ. of Hong Kong (Hong Kong China); Mike Gal, Univ. of New South Wales (Australia)

10.30: Micro/nano-scale fabrication of integrated polymer optical wire circuit arrays for optical printed circuit board (O-PCB) application (Invited Paper), E. Lee, Inha Univ. (South Korea) [5650-19]

11.00: Progress in InP-based MOEMS, M. Strassner, S. Bouchoule, I. Sagnes, CNRS (France) [5650-20]

11.15: Devitrification theory and glass-forming phase diagrams of fluoride glass compositions, P. McNamara, R. Mair, Univ. of Sydney (Australia) [5650-105]

11.30: Self-assembled GaAs micro-mirrors monolithically integrated with LED, N. Dharmarasu, K. Kubota, S. Saravanan, P. O. Vaccaro, N. Saito, Advanced Telecommunications Research Institute International (Japan) [5650-23]

11.45: Propagation loss reduction of photonic crystal slab waveguides by microspheres, C. Chen, National Central Univ. (Taiwan) [5650-24]

Lunch Break 12.00 to 13.30

SESSION 5

Room: BioMed Lecture Theatre C Tues. 13.30 to 15.15

Fabrication Techniques I

Chairs: Peter J. Evans, Australian Nuclear Science and Technology Organisation (Australia); David N. Jamieson, Univ. of Melbourne (Australia)

13.30: Fabrication of waveguides in glass and polymers with Fs- and Ns-laser radiation (Invited Paper), E. W. Kreutz, RWTH-Aachen (Germany) [5650-25]

14.00: Cure rate and the dry etch patterning of thermoset polymer films, A. S. Holland, M. Montoya, D. Simon, R. Shanks, RMIT Univ. (Australia) [5650-26]

14.15: Ge nanocrystals embedded in Hf-aluminate high-k gate dielectric for floating gate memory application, J. Dai, P. Lee, W. Liu, Hong Kong Polytechnic Univ. (Hong Kong China) [5650-63]

14.30: Fabrication of planar electromagnetic components with different aspect ratios in a single layer, Y. Fu, Swinburne Univ. of Technology (Australia); E. C. Harvey, Swinburne Univ. of Technology (Australia) and MiniFab (Australia); M. K. Ghantasala, Western Michigan Univ. (USA) [5650-28]

14.45: Selective adhesive bonding with SU-8 for zero-level-packaging, D. S. Reuter, G. Schwenzer, A. Bertz, Technische Univ. Chemnitz (Germany); T. Gessner, Technische Univ. Chemnitz (Germany) and FhG IZM, Micro Devices and Equipment (Germany) [5650-29]

15.00: STM characterisation of phosphine adsorption on STM-patterned H:Si(001) surfaces, T. Hallam, L. Oberbeck, N. J. Curson, M. Y. Simmons, Univ. of New South Wales (Australia) [5650-30]

Afternoon Tea 15.15 to 15.45

SESSION 6

Room: BioMed Lecture Theatre C Tues. 15.45 to 16.45

Fabrication Techniques II

Chairs: Changyi Yang, Univ. of Melbourne (Australia); Erol C. Harvey, Swinburne Univ. of Technology (Australia)

15.45: Fabrication of PZT micro devices through an improved sol-gel process, M. Hu, Nanyang Technological Univ. (Singapore) [5650-31]

16.00: High-aspect-ratio scanning electrode array for simultaneous SECM and AFM analysis, Y. Tao, R. J. Fasching, F. B. Prinz, Stanford Univ. (USA) [5650-106]

16.15: Fabrication of an integrated microfluidic and surface acoustic wave device for fluid analysis, D. A. Karla, A. S. Holland, K. Kalantar-Zadeh, G. Rosengarten, RMIT Univ. (Australia); A. P. O'Neill, National Univ. Of Ireland/Cork (Ireland) [5650-33]

16.30: Development of a micro blood typing system using micro-stereolithography technology, S. Lee, H. Kang, D. Cho, Pohang Univ. of Science and Technology (South Korea); Y. Kim, G. Lee, Catholic Univ. Medical College (South Korea) [5650-35]

Posters -Tuesday

Posters will be displayed all day Tuesday. Poster presenters will stand by their posters from 17.15 to 18.30 to answer questions. Posters must be removed at the end of the poster session. Poster authors, see Travel/General Information for setup instructions.

• Injection molding of grating optical elements with microfeatures, C. Wu, W. Chen, Dayeh Univ. (Taiwan) [5650-21]
• Polygon microlens array design and fabrication using thermal pressing in LIGA-like process, R. F. Shyu, National Huwei Institute of Technology (Taiwan); H. Yang, National Chung Hsing Univ. (Taiwan); C. Ho, National Huwei Institute of Technology (Taiwan) [5650-27]
• Fabrication of injection molded diffuser micropumps, C. Wu, W. Hsu, Dayeh Univ. (Taiwan) [5650-32]
• Study of 5CB absorbed on nano-roughened Ag and Au electrodes by surface-enhanced Raman scattering, H. Zhou, Xiamen Univ. (China) [5650-49]
• 100nm-scale electroplated nickel stamper fabricated by E-beam lithography on chrome/quartz mask, D. Choi, Korea Institute of Machinery and Materials (South Korea) [5650-50]
• Theoretical and experimental comparison of splashing in deposition of copper and graphite thin films by PLD, M. Kaleeque-ur-Rahman, M. S. Rafeeque, K. Siraj, M. S. Anwar, H. Faiz, Univ. of Engineering and Technology Lahore (Pakistan) [5650-51]
• Explore of a new wafer level hermetic sealing method by Cu/Sn isothermal solidification technique for MEMS/NEMS devices, M. Du, W. Xu, L. Luo, Shanghai Institute of Microsystems and Information Technology (China) [5650-54]
• Development of a MEMS-based microcombustor for a micro gas turbine engine, X. C. Shan, Y. Jin, Z. Wang, Singapore Institute of Manufacturing Technology (Singapore) [5650-55]
• Modal hybridism of polarization maintaining photonic crystal fibers by using a full-vectorial finite element method, M. Rajarajan, City Univ. London (United Kingdom) [5650-56]
• Sol-gel derived Sb-doped SnO2/SiO2 nano-composite thin films for gas sensors, Z. Gu, Shanghai Univ. of Science and Technology (China); P. Liang, W. Zhang, Shanghai Institute of Optics and Fine Mechanics (China) [5650-59]
• Centerless grinding unit used for precisely processing ferrules of optical fiber connector, Y. Wu, T. Kondo, M. Kato, Akita Prefectural Univ. (Japan) [5650-60]
• Self-assembling iron silicide nanobars and structure on silicon wafer by microwave plasma method, B. Xu, Tsinghua Univ. (China); Y. Zhang, Tsinghua Univ. (China) and Tsinghua Ctr. for Electronics and Photonics (China); H. Zhu, Beijing Institute of Technology (China); D. Shen, Tsinghua Univ. (China) [5650-61]
• Multi-walled carbon nanotubes gas sensor of excellent recovery properties for NO2 gas, S. Moon, Korea Institute of Science and Technology (South Korea) and Korea Univ. (South Korea); W. Cho, Korea Institute of Science and Technology (South Korea); Y. Lee, S. Kim, Korea Univ. (South Korea); B. Ju, Korea Institute of Science and Technology (South Korea) [5650-64]
• Plasma-induced processing for microfabrication of transparent materials using an Q-switched Nd:YAG laser, S. Qin, Z. P. Zhang, Guizhou Univ. (China); W. J. Li, Chinese Univ. of Hong Kong (Hong Kong China) [5650-65]
• Analysis of dilation induced by AFM nanotube tip vibration in linewidth measurement, Z. Xiao, Harbin Institute of Technology (China) [5650-67]
• Ion beam lithography with counted ions and nanostencils, P. Reichart, Univ. of Melbourne (Australia); A. Alves, RMIT Univ. (Australia); S. M. Hearne, D. N. Jamieson, P. N. Johnston, Univ. of Melbourne (Australia) [5650-68]
• Characteristics of LTCC RF switch modules for GSM band, J. Kim, Yeungnam Univ. (South Korea); I. Kim, B. Min, J. Song, Korea Electrotechnology Research Institute (South Korea); Y. Suh, H. Nam, Yeungnam Univ. (South Korea) [5650-69]
• Frequency dependency of the characteristics in the spiral type thin film inductors, D. Park, B. Min, I. Kim, J. Song, Korea Electrotechnology Research Institute (South Korea) [5650-70]
• Characteristics of nano sized TiO2 dye-sensitized solar cell as a function of preparing method of counter electrode, B. Koo, D. Lee, H. Kim, W. Lee, J. Song, Korea Electrotechnology Research Institute (South Korea) [5650-71]
• Characteristics of dye-sensitized solar cell with nanocrystalline ZnO electrode, H. Kim, D. Lee, W. Lee, B. Koo, J. Song, Korea Electrotechnology Research Institute (South Korea) [5650-72]
• Topology optimization of the optical tweezers setup, S. Hwang, Y. Lee, Gwangju Institute of Science and Technology (South Korea) [5650-73]
• Structural and magnetic properties Ni-Zn and Ni-Zn-Al ferrites prepared through aerosol route, K. Chandra, S. Singhal, Indian Institute of Technology/Roorkee (India) [5650-74]
• Fabrication of components for microdroplet ejector by electroforming technology, C. H. Cheng, Dayeh Univ. (Taiwan); S. C. Chen, National Changhua Univ. of Education (Taiwan); T. S. Chen, Dayeh Univ. (Taiwan) [5650-75]
• Rotor-bearing system model for micro-scale high speed hydro-dynamical gas bearings, H. Huang, G. Meng, Shanghai Jiaotong Univ. (China) [5650-76]
• Method for accurately shape-prediction of 3D structure fabricated by x-ray lithography, M. Horade, S. Khumpuang, S. Susumu, Ritsumeikan Univ. (Japan) [5650-77]
• Plastic thermally-controllable platform with integrated thin film micro-components, D. S. Lee, K. H. Chung, H. Yang, Y. T. Lim, S. H. Park, S. Kim, K. Kim, H. B. Pyo, Electronics and Telecommunications Research Institute (South Korea) [5650-78]
• Phase change memories, S. Natarajan, A. Alvandpour, Linköping Univ. (Sweden) [5650-81]
• Two-dimensional MEMS-based micro cabin mirrors for an optical switch matrix, Y. Dong, L. Wang, W. Qin, Beijing Univ. of Posts and Telecommunications (China); G. Kuo, National Chengchi Univ. (Taiwan) [5650-82]
• A novel switching architecture of 2D MEMS rearrangeably non-blocking Clos matrix with double-sided mirrors, Y. Dong, Beijing Univ. of Posts and Telecommunications (China); G. Kuo, National Chengchi Univ. (Taiwan) [5650-83]
• Mechanical behavior of the precision component after synchronous vibratory joining, W. Wu, National Chung Hsing Univ. (Taiwan) [5650-84]
• Complex rare-earth substituted lead titanate piezoceramics, E. E. Dimitriu, REGO COM SRL (Romania); F. Craciun, Istituto di Acustica "O.M. Corbino" (Italy); R. Ramer, Univ. of New South Wales (Australia); G. Prodan, V. Ciupina, Univ. Ovidius Constanta (Romania) [5650-86]
• Detector techniques of femtosecond lasers in microsystems, M. Zhou, Jiangsu Univ. of Science and Technology (China) [5650-87]
• Development of a silicon-based single electron transistor, S. J. Angus, E. Gauja, C. Smith, Univ. of New South Wales (Australia); G. Snider, R. G. Clark, Univ. of Notre Dame (USA); A. S. Dzurak, Univ. of New South Wales (Australia) [5650-88]
• Protein folding and unfolding by force microscopy: a novel 'inverse' methodology, G. S. Watson, S. Myhra, J. A. Watson, Griffith Univ. (Australia) [5650-89]
• Tip-induced nano-scale manipulation of Si and DLC surfaces: 'anodic' versus thermal oxidation, S. Myhra, G. S. Watson, Griffith Univ. (Australia) [5650-90]
• Micro/nano scale lithography of poly (dimethylsiloxane) using scanning force microscopy, J. A. Watson, S. Myhra, G. S. Watson, Griffith Univ. (Australia) [5650-91]
• Embedded SRAM design issues for technologies 90nm and beyond, S. Natarajan, S. Romanovsky, A. Achyuthan, MoSys Inc. (Canada) [5650-93]
• Simulations of Shor's algorithm with implications to scaling and quantum error correction, S. J. Devitt, A. G. Fowler, L. C. L. Hollenberg, Univ. of Melbourne (Australia) and Ctr. for Quantum Computer Technology (Australia) [5650-94]
• Exchange coupling calculations using full configuration interaction, T. R. Starling, L. C. L. Hollenberg, C. J. Wellard, Univ. of Melbourne (Australia) and Ctr. for Quantum Computer Technology (Australia); W. Haig, Department of Defence (Australia) [5650-95]
• Quantum-dot cellular automata using buried dopants, J. H. Cole, A. D. Greentree, C. J. Wellard, L. C. L. Hollenberg, S. D. Prawer, Univ. of Melbourne (Australia) [5650-96]
• Single-spin optical readout scheme for solid-state quantum computers, M. J. Testolin, L. C. L. Hollenberg, C. J. Wellard, A. D. Greentree, Univ. of Melbourne (Australia) and Ctr. for Quantum Computer Technology (Australia) [5650-97]
• Dephasing of a charge qubit by charge fluctuations, J. C. Ang, C. J. Wellard, L. C. L. Hollenberg, Univ. of Melbourne (Australia) [5650-98]
• Optimizing single electron transistors for high-precision electrometry of quantum dots, V. Conrad, A. D. Greentree, C. J. Wellard, L. C. L. Hollenberg, Univ. of Melbourne (Australia) [5650-99]
• Synthesis of organic-inorganic hybrid nanocomposite material: alizarin-3-sulfonate in the lamella of zinc-aluminium-layered double hydroxide, M. Zobir bin Hussein, A. H. Yahaya, Z. Zainal, C. W. Long, Univ. Putra (Malaysia) [5650-100]
• Constructing arbitrary fault-tolerant gates, A. G. Fowler, S. J. Devitt, L. C. L. Hollenberg, Univ. of Melbourne (Australia) and Ctr. for Quantum Computer Technology (Australia) [5650-101]
• A configurable classification engine for polymorphous chip architecture, M. Yadav, M. Al Dwairi, P. Hamilton, R. Sears, Y. Viniotis, T. Conte, P. D. Franzon, North Carolina State Univ. (USA) [5650-104]

Wednesday 15 December

Mathews Lecture Theatre A

8.30 to 9.15 Plenary Presentation: Field Induced Terahertz Wave Emission Microscope with Nanometer Resolution, Xi-Cheng Zhang, Rensselaer Polytechnic Institute (USA)

9.15 to 10.00 Plenary Presentation: MEMS Startups: Disruptive Technology and Business Do's and Don'ts, Janusz Bryzek, LV Sensors, Inc. (USA)

10.00 to 10.30 Morning Tea

SESSION 7

Room: BioMed Lecture Theatre C Wed. 10.30 to 12.15

Characterisation and Systems

Chairs: Erol C. Harvey, Swinburne Univ. of Technology (Australia); Mary J. Li, NASA Goddard Space Flight Ctr. (USA)

10.30: Characterisation of laser micromachining of metals, P. J. McMahon, P. Vincent, R. F. Muscat, A. R. Wilson, Defence Science and Technology Organisation (Australia) [5650-36]

10.45: Control of MEMS-based actuators array for micro smart systems, Y. Chapuis, Univ. of Tokyo (Japan) and Univ. Louis Pasteur de Strasbourg (France); Y. Fukuta, Univ. of Tokyo (Japan); L. Zhou, Univ. Louis Pasteur de Strasbourg (France); Y. Mita, H. Fujita, Univ. of Tokyo (Japan) [5650-37]

11.00: Magnetoresistive random access memories, S. Natarajan, Linköping Univ. (Sweden) and MoSys Inc (Canada); A. Alvandpour, Linköping Univ. (Sweden) [5650-38]

11.15: EMC problems in microelectronic sensor packaging, A. Gandelli, F. Grimaccia, M. Mussetta, R. E. Zich, Politecnico di Milano (Italy) [5650-39]

11.30: MEMS based inductor implementation for RF front-end of mobile terminal, V. J. Vibhute, V. Kyatsandra, J. Singh, A. Zayegh, A. Stojcevski, Victoria Univ. (Australia) [5650-40]

11.45: Better mechanical structures for measuring very small mass, B. Sun, Cape Peninsula Univ. of Technology (South Africa) and Jinan Univ. (China); R. Zhang, Cape Peninsula Univ. of Technology (South Africa) [5650-41]

12.00: Characterization of droplet ejection process for a piezoelectric inkjet printhead, A. Yang, C. Cheng, Dayeh Univ. (Taiwan) [5650-42]

Lunch Break 12.15 to 13.30

SESSION 8

Room: BioMed Lecture Theatre C Wed. 13.30 to 15.15

Materials and Fabrication Techniques

Chairs: David N. Jamieson, Univ. of Melbourne (Australia); Changyi Yang, Univ. of Melbourne (Australia)

13.30: Nanoimprint lithography: full wafer replication of nanometer features, R. Pelzer, EV Group Inc. (Austria); C. Gourgon, CNRS (France); S. Landis, CEA-LETI (France); P. Kettner, EV Group Inc. (Austria) [5650-43]

13.45: Surface modification of silicon nano mechanical structures by self-ion implantation for stress manipulation, W. F. Schmidt, K. R. Virwani, A. P. Malshe, Univ. of Arkansas/Fayetteville (USA); D. K. Sood, RMIT Univ. (Australia); R. G. Elliman, The Australian National Univ. (Australia) [5650-44]

14.00: Quartz crystal microbalance studies of ALD film growth, P. J. Evans, G. Triani, K. S. Finnie, K. Short, J. R. Bartlett, Australian Nuclear Science and Technology Organisation (Australia) [5650-45]

14.15: Novel fabrication method of metallic glass thin film using carousel type sputtering system, J. Sakurai, S. Hata, A. Shimokohbe, Tokyo Institute of Technology (Japan) [5650-46]

14.30: Surface acoustic wave (SAW) based ozone sensor with a In2O3/Si3N4/36YX LiTaO3 structure, A. Fechete, RMIT Univ. (Australia) and CRC for microTechnology (USA); S. J. Ippolito, RMIT Univ. (Australia); K. Kalantar-Zadeh, W. Wlodarski, RMIT Univ. (Australia) and CRC for microTechnology (Australia); A. S. Holland, RMIT Univ. (Australia) [5650-47]

14.45: Investigation of layered saw sensors based on a WO3/ZnO/64° YX LiNbO3 structure with gold catalytic layer, V. P. Sivan, S. J. Ippolito, S. Kandasamy, K. Kourosh, W. Wlodarski, RMIT Univ. (Australia) [5650-48]

15.00: Microwave hydrothermal synthesis of nanosize Ta2O5 added Mg-Cu-Zn ferrites, T. Krishnaveni, S. R. Murthy, Osmania Univ. (India) [5650-103]

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