SPIE International Symposium on Microtechnologies for the New Millennium 2005

 

May 9-11, 2005

Hotel Meliá Sevilla

Sevilla, Spain

 

Smart Sensors, Actuators and MEMS Conference, Final Program

 

Conference Chair: Carles Cané, Ctr. Nacional de Microelectrónica (IMB-CSIC) (Spain)

Cochairs:

Jung-Chih Chiao, Univ. of Texas/Arlington (USA);

Fernando Vidal Verdú, Univ. de Málaga (Spain)

 

Program Committee: John A. Alderman, Univ. College (Ireland); Kris Baert, IMEC (Belgium); Joan Bausells, Ctr. Nacional de Microelectrónica (Spain); Thomas Becker, EADS Deutschland GmbH (Germany); Jin-Chern Chiou, National Chiao Tung Univ. (Taiwan); Jose Higino Correia, Univ. do Minho (Portugal); Nicolaas F. de Rooij, Univ. de Neuchâtel (Switzerland); Gilles Delapierre, CEA-LETI (France); Masayoshi Esashi, Tohoku Univ. (Japan); Alan G. Evans, Univ. of Southampton (United Kingdom); Carles Ferrer, Univ. Autònoma de Barcelona/IMB-CNM-CSIC (Spain); Hiroyuki Fujita, Univ. of Tokyo (Japan); Thomas George, Jet Propulsion Lab. (USA); Javier Gracia, Ctr. de Estudios e Investigaciones Técnicas (Spain); Katia M. Grenier, LAAS-CNRS (France); Moustapha Hafez, CEA - LIST (France); Kazuhiro Hane, Tohoku Univ. (Japan); Erol C. Harvey, Swinburne Univ. of Technology (Australia); Klas Hjort, Uppsala Univ. (Sweden); Wensyang Hsu, National Chiao Tung Univ. (Taiwan); Gianfranco Innocenti, Centro Richerche Fiat (Italy); Chantal G. Khan-malek, CNRS (France); Eun S. Kim, Univ. of Southern California (USA); Edward S. Kolesar, Jr., Texas Christian Univ. (USA); Armin Lambrecht, Fraunhofer-Institut für Physikalische Messtechnik (Germany); Jeong-Bong Lee, Univ. of Texas/Dallas (USA); Liwei Lin, Univ. of California/Berkeley (USA); Victor M. Lubecke, Univ. of Hawaii/Manoa (USA); Ingemar Lundström, Linköping Univ. (Sweden); Dean P. Neikirk, Univ. of Texas/Austin (USA); Frank Niklaus, Royal Institute of Technology (Sweden); Ash M. Parameswaran, Simon Fraser Univ. (Canada); Andre Perret, CSEM SA (Switzerland); Steve Setford, Cranfield Univ. (United Kingdom); Pietro Siciliano, Institute for Microelectronics and Microsystems IMM-CNR (Italy); Hans Siegenthaler, Univ. Bern (Switzerland); Michael J. Sinclair, Microsoft Corp. (USA); Christos Tsamis, NCSR Demokritos (Greece); Wouter van der Wijngaart, Royal Institute of Technology (Sweden)

 

Created by J.C. Chiao