Published Final Programs

Proceedings of SPIE Volume: 6037

Device And Process Technologies For Microelectronics, Mems, And Photonics Iv

SPIE's International Symposium on
Microelectronics, MEMS, and Nanotechnology 2005

11–15 December 2005
Queensland Univ. of Technology
Brisbane, Australia

2005 Symposium Chairs:
John M. Bell, Queensland Univ. of Technology (Australia)
Vijay K. Varadan, Univ. of Arkansas (USA)

SPIE Conference 6037 Device And Process Technologies For Microelectronics, Mems, And Photonics

Conference Chair: Jung-Chih Chiao, The Univ. of Texas at Arlington (USA)

Cochairs:

Andrew S. Dzurak, Univ. of New South Wales (Australia);

Chennupati Jagadish, The Australian National Univ. (Australia);

David V. Thiel, Griffith Univ. (Australia)

INTRODUCTION

This multidisciplinary conference covers a wide scope of topical materials, fabrication, processes, packaging, and systems issues involving microtechnology, nanotechnology, and photonics. The conference will bring together university, industry, and government researchers to discuss the present state of microtechnology, nanotechnology and photonics, identifying emergent and future directions in the areas. With advancement in science, increasing interest in the interfaces between advanced technologies and the biological and quantum domains become intensified. All five

conferences in this symposium welcome this perspective.

SCOPE

• fundamental science at the nanoscale

• quantum computer technology

• single electron transistors

• sensors

• self-assembly materials and structures

• MEMS

• MOEMS

• nanoelectromechanical systems (NEMS)

• quantum electromechanical systems (QEMS)

• advanced synchrotron mediated processes

• compound semiconductors

• micro- and nanophotonic devices

• terahertz technologies

• micro- and nanomachining techniques

• atomic force microscopy (AFM)

• laser micromachining

• maskless photolithography

• hybrid and integrated packaging

• sub-wavelength optics

• low-cost micro and nanofabrication

• surface plasmon photonics

• photonic crystal devices and fibers

• conventional and new semiconductor device

fabrication

• piezoelectrics

• ceramics

• nanoparticles

• nanorods

• sol-gel

• smart polymers

• nanoparticle embedded polymers

• materials for polymer electronics

• carbon nanotubes

• metals

• alloys

• composites

• plasma treated surfaces

• conducting polymers

• polymer actuators

• self-organized nanomaterials

• materials for quantum devices and quantum

computation

• materials for photonic devices

• materials for MOEMS

• materials for MEMS

• materials for advanced VLSI processes

• material characterization

• light emission from silicon nanocrystals

• silicon-based photonics

• nanocrystal waveguides

• ion-beam synthesis of nanocrystals

• HgCdTe MBE growth

• AlGaN/GaN HEMT technology

• GaN

• VCSELs

• quantum well and quantum dot photodetectors

• epitaxial growth of quantum dots and quantum wires

• spintronics

• quantum well/dot intermixing

• quantum dot self-assembly and selforganisation

• hybrid materials for photonics

• nanowires

• molecular electronics

• plastic molding

• hot embossing

• wafer bonding

• wafer transfer

• photolithography

• electroplating

• fabrication modeling.

Program Committee:

Program Committee:

Program Committee: Richard J. Blaikie, Univ. of Canterbury (New Zealand);

Simon A. Brown, Univ. of Canterbury (New Zealand);

Carles Cané, Ctr. Nacional de Microelectrónica (Spain);

Mu Chiao, The Univ. of British Columbia (Canada);

Franck A. Chollet, Nanyang Technological Univ. (Singapore);

Debabani Choudhury, HRL Labs., LLC (USA);

Nicolaas F. de Rooij, Univ. de Neuchâtel (Switzerland);

John M. Dell, The Univ. of Western Australia (Australia);

Robert G. Elliman, The Australian National Univ. (Australia);

Masayoshi Esashi, Tohoku Univ. (Japan);

Lorenzo Faraone, The Univ. of Western Australia (Australia);

Catherine P. Foley, Commonwealth Scientific & Industrial Research Organisation (Australia);

Paul D. Franzon, North Carolina State Univ. (USA);

Thomas George, Jet Propulsion Lab. (USA);

Katia M. Grenier, LAAS-CNRS (France);

Alex R. Hamilton, Univ. of New South Wales (Australia);

Kazuhiro Hane, Tohoku Univ. (Japan);

Erol C. Harvey, Swinburne Univ. of Technology (Australia);

Conrad D. James, Sandia National Labs. (USA);

David N. Jamieson, The Univ. of Melbourne (Australia);

Chantal G. Khan-Malek, CNRS Aeronmie (France);

Yong Hyup Kim, Seoul National Univ. (South Korea);

Youngwoo Kwon, Seoul National Univ. (South Korea);

Ronald A. Lawes, Imperial College London (United Kingdom);

Lih-Yuan Lin, Univ. of Washington (USA);

Liwei Lin, Univ. of California/Berkeley (USA);

Cheng-Hsien Liu, National Tsing Hua Univ. (Taiwan);

Victor M. Lubecke, Univ. of Hawaii at Manoa (USA);

Barry Luther-Davies, The Australian National Univ. (Australia);

Meyya Meyyappan, NASA Ames Research Ctr. (USA);

Giacinta Parish, The Univ. of Western Australia (Australia);

Steven D. Prawer, The Univ. of Melbourne (Australia);

Kazuo Sato, Nagoya Univ. (Japan);

Michael S. Shur, Rensselaer Polytechnic Institute (USA);

Michael J. Sinclair, Microsoft Corp. (USA);

Yu-Chuan Su, National Tsing Hua Univ. (Taiwan);

Hitoshi Tabata, Osaka Univ. (Japan);

Ooi-Kiang Tan, Nanyang Technological Univ. (Singapore);

Alan R. Wilson, Defence Science and Technology Organisation (Australia);

Sai Peng Wong, The Chinese Univ. of Hong Kong (Hong Kong China)

Created by J.C. Chiao