Facility

AJA ATC ORION Series Thermal Evaporation System

Thermal Evaporation Sources
(3) thermal evaporation sources with resistive molybdenum boats.
(2) 900W power supply with 2 way switchbox.
Quartz Crystal Thickness Monitor
Substrate Holder with the following features:

*accommodates substrates up to 6” diameter

*continuous motorized rotation (0-20 RPM) with controller

*radiant heating to 850 °C with quartz halogen lamp for samples up to 4”, 300 °C for samples 4” – 6”

 


All Deposition and Etching Facilities

• AJA ATC ORION Series Thermal Evaporation System
• AJA ATC ORION Series Evaporation System
• AJA ATC ORION Series UHV Sputtering System
• CHA Electron-Beam Evaporator
• Cressington Gold Sputtering Deposition
• Home-Built Sputter System
• KJL LAB 18 Sputtering
• Neocera Pulsed Laser Deposition Facilities
• Nickel Electroplating
• TRION ORION II PECVD/LPCVD System
Back to All Facilities