Facility

Zeiss LSM 5 Pascal Confocal Microscope

1 Channel, Argon + Green HeNe, MOTF
Software

* LSM 510 TOPOGRAPHY SW V4.0

* LSM STITCHART PLUS SW V4.0
6 Position Reflector Turret with Cubes for Different Reflected

* Techniques

* Brightfield

* Darkfield

* Polarized light
C-DIC
LSM5 Phototube
Motorized Scanning Stage
Fluorescence
Eye pieces: 5x, 10x, 20x, 50x, 100x
Vibration Isolation Table
Axiocam HRc Color Digital Camera

 


All Characterization Facilities

Dimension 5000 AFM
Electrical Test Station
HP 4061A Test Station
KLA-Tencor Alpha-Step IQ Profilometer
KLA-TENCOR PROFILOMETER
Nomarski Microscope
OCEAN OPTICS NC-UV-VIS REFLECTOMETER
Zeiss LSM 5 Pascal Confocal Microscope
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