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Desposition- AJA ATC ORION Series Thermal Evaporation System
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DISTINGUISHED SPEAKER SERIES MICRO & NANO-SYSTEMS
ATTEND SPEAKER SERIES
RSVP to Thanh Bui at tbui@uta.edu or 817-272-1536. This series is in conjunction with EE 5344 – Introduction to MEMS, which is offered by UTA. Information about this course and microsensor activities at UTA can be obtained from Professor Z. Celik-Butler at zbutler@uta.edu. - CONTACTS
Facility
Disco DAD3220 Automatic Dicing Saw, 160mm
KEY FEATURES
Up to 160mm Workpiece Size
Pattern Recognition Camera w/auto alignment
Windows Operating System
GUI Interface (Touch Screen)
Advanced Process Controls/ Analysis Tools
Accuracy: Single Step: 3um / 5mm
Cumulative Step: 5um / 160mm
320o theta rotation
1.5kW, Non Seizing, Air Bearing Syncro Spindle
2 inch standard blade.
< 0.5m2 Footprint
All Dicing-and-Bonding Facilities
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UT Arlington | College of Engineering | Contacts
Open to scientists with and outside UT Arlington, The Nanotechnology
Research & Education Center is the preeminent university-based
nanotechnology research, development, and teaching facility in North Texas.