Facility

Home-Built Sputter System

Key Features

* One three-inch RF magnetron sputter gun from Angstrom

* Sciences

* Two process gases with MFCs

* Substrates up to 4” diameter

 


All Deposition and Etching Facilities

AJA ATC ORION Series Thermal Evaporation System
AJA ATC ORION Series Evaporation System
AJA ATC ORION Series UHV Sputtering System
CHA Electron-Beam Evaporator
Cressington Gold Sputtering Deposition
Home-Built Sputter System
KJL LAB 18 Sputtering
Neocera Pulsed Laser Deposition Facilities
Nickel Electroplating
TRION ORION II PECVD/LPCVD System
Back to All Facilities