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Characterization
Desposition- AJA ATC ORION Series Thermal Evaporation System
- AJA ATC ORION Series Evaporation System
- AJA ATC ORION Series UHV Sputtering System
- CHA Electron-Beam Evaporator
- Cressington Gold Sputtering Deposition
- Home-Built Sputter System
- Neocera Pulsed Laser Deposition Facilities
- Nickel Electroplating
- TRION ORION II PECVD/LPCVD System
- More...
Etching-Ashing - FACULTY
- RESEARCH
- PRESENTATIONS
DISTINGUISHED SPEAKER SERIES MICRO & NANO-SYSTEMS
ATTEND SPEAKER SERIES
RSVP to Thanh Bui at tbui@uta.edu or 817-272-1536. This series is in conjunction with EE 5344 – Introduction to MEMS, which is offered by UTA. Information about this course and microsensor activities at UTA can be obtained from Professor Z. Celik-Butler at zbutler@uta.edu. - CONTACTS
Facility
Electrical Test Station
Probe Station
*Micromanipulator Model: 8060-US8-V0-1-A
*Manual 200 mm probe station
*8” Triaxial Chuck
*Microscope with 2X zoom and 50X Super Long Working Objective
*Light Tight Enclosure, Roll Top Doors
*Vibration isolation table, 30” x 36”
*Manipulator, left handed 100 TPI, W/90degree mt. (2)
*Manipulator, right handed 100 TPI, w/90degree mt (3)
Probe Holder, Triaxial, 8000, Set Screw (5)
Test Station
*Agilent Technologies Model: 4155C – Semiconductor Parameter Analyzer
gilent Technologies Model: 4284A – Precision LCR meter 20Hz to 1MHz
All Characterization Facilities
- User Policies
- Internal User Application
- External User Application
- User Fees Schedules
- NanoFab Printable Brochure
- SEM-FIB-Ebeam Writer Application
- Equipment Contacts
- Equipment Reservation and Status
- Nano-MEMS Ph.D. Diagnostic Exam Information
- Student Travel Application
- NanoFab Cleanroom Rules and Guidelines
- Cleanroom Rules Violation Form
- Safety Protocol Training Schedule
UT Arlington | College of Engineering | Contacts
Open to scientists with and outside UT Arlington, The Nanotechnology
Research & Education Center is the preeminent university-based
nanotechnology research, development, and teaching facility in North Texas.