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    Characterization

    • Dimension 5000 AFM
    • Electrical Test Station
    • HP 4061A Test Station
    • KLA-Tencor Alpha-Step IQ Profilometer
    • Nomarski Microscope
    • OCEAN OPTICS NC-UV-VIS REFLECTOMETER
    • Zeiss LSM 5 Pascal Confocal Microscope
    • More...



    Desposition

    • AJA ATC ORION Series Thermal Evaporation System
    • AJA ATC ORION Series Evaporation System
    • AJA ATC ORION Series UHV Sputtering System
    • CHA Electron-Beam Evaporator
    • Cressington Gold Sputtering Deposition
    • Home-Built Sputter System
    • Neocera Pulsed Laser Deposition Facilities
    • Nickel Electroplating
    • TRION ORION II PECVD/LPCVD System
    • More...



    Etching-Ashing

    • Diener Electronics Asher
    • Supercritical Point Dryer
    • Technics Micro-RIE Series 800 Plasma System
    • TRION Deep Reactive Ion Etching (DRIE) System
    • TRION MINILOCK II RIE System
    • More...



    Dicing-Bonding

    • EVG 520IS Wafer Bonder
    • Disco DAD3220 Automatic Dicing Saw, 160mm
    • Microautomation 1100 Dicing Saw
    • West Bond Model 7476E-79 Wedge Wire Bonder
    • Kulicke & Soffa Model 4524 Ball Bonder
    • Kulicke & Soffa (K&S) Model 4124-2: Ball Bonder
    • More...
  • FACULTY
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    DISTINGUISHED SPEAKER SERIES MICRO & NANO-SYSTEMS


    • Spring 2013
    • Fall 2012
    • Spring 2012
    • Fall 2011
    • Spring 2011
    • Fall 2010
    • Spring 2010
    • Fall 2009
    • Spring 2009
    • Fall 2008
    • Fall 2007
    • Spring 2008
    • Spring 2007
    • Fall 2006
    • Spring 2006

    ATTEND SPEAKER SERIES

    RSVP to Thanh Bui at tbui@uta.edu or 817-272-1536.  This series is in conjunction with EE 5344 – Introduction to MEMS, which is offered by UTA.  Information about this course and microsensor activities at UTA can be obtained from Professor Z. Celik-Butler at zbutler@uta.edu.          
  • CONTACTS

Facility

Supercritical Point Dryer

-815B, Series B, made by Tousimis

 


All Etching-Ashing Facilities

• Diener Electronics Asher
• Plasmatherm Etcher
• Supercritical Point Dryer
• Technics Micro-RIE Series 800 Plasma System
• TRION Deep Reactive Ion Etching (DRIE) System
• TRION MINILOCK II RIE System
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UT Arlington | College of Engineering | Contacts

Open to scientists with and outside UT Arlington, The Nanotechnology
Research & Education Center is the preeminent university-based
nanotechnology research, development, and teaching facility in North Texas.