Facility

CHA Electron-Beam Evaporator

* Four-hearth rotating e-gun source

* Cryopump

* Quartz-crystal thickness monitors

* Two shutters – source and substrate

* Liquid heating or cooling option for substrate

* In-chamber bake-out lamps

* Water-cooled chamber

 


All Deposition and Etching Facilities

• AJA ATC ORION Series Thermal Evaporation System
• AJA ATC ORION Series Evaporation System
• AJA ATC ORION Series UHV Sputtering System
• CHA Electron-Beam Evaporator
• Cressington Gold Sputtering Deposition
• Home-Built Sputter System
• KJL LAB 18 Sputtering
• Neocera Pulsed Laser Deposition Facilities
• Nickel Electroplating
• TRION ORION II PECVD/LPCVD System
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