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Desposition- AJA ATC ORION Series Thermal Evaporation System
- AJA ATC ORION Series Evaporation System
- AJA ATC ORION Series UHV Sputtering System
- CHA Electron-Beam Evaporator
- Cressington Gold Sputtering Deposition
- Home-Built Sputter System
- Neocera Pulsed Laser Deposition Facilities
- Nickel Electroplating
- TRION ORION II PECVD/LPCVD System
- More...
Etching-Ashing - FACULTY
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DISTINGUISHED SPEAKER SERIES MICRO & NANO-SYSTEMS
ATTEND SPEAKER SERIES
RSVP to Thanh Bui at tbui@uta.edu or 817-272-1536. This series is in conjunction with EE 5344 – Introduction to MEMS, which is offered by UTA. Information about this course and microsensor activities at UTA can be obtained from Professor Z. Celik-Butler at zbutler@uta.edu. - CONTACTS
Facility
HP 4061A Test Station
- Fully-automated with switching controller for current-voltage and capacitance-voltage scans
- Shielded micromanipulator probe station for ultra low-noise measurements
- Signatone shielded probe station with temperature-controlled chuck for high temperature scans
- Vacuum chuck probe station for low-temperature measurements
All Characterization Facilities
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- NanoFab Printable Brochure
- SEM-FIB-Ebeam Writer Application
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- Equipment Reservation and Status
- Nano-MEMS Ph.D. Diagnostic Exam Information
- Student Travel Application
- NanoFab Cleanroom Rules and Guidelines
- Cleanroom Rules Violation Form
- Safety Protocol Training Schedule
UT Arlington | College of Engineering | Contacts
Open to scientists with and outside UT Arlington, The Nanotechnology
Research & Education Center is the preeminent university-based
nanotechnology research, development, and teaching facility in North Texas.