Facility

Dimension 5000 AFM

Tapping Mode, contact mode, MFM
Can accommodate up to 8” diameter wafer

 


All Characterization Facilities

Dimension 5000 AFM
Electrical Test Station
HP 4061A Test Station
KLA-Tencor Alpha-Step IQ Profilometer
KLA-TENCOR PROFILOMETER
Nomarski Microscope
OCEAN OPTICS NC-UV-VIS REFLECTOMETER
Zeiss LSM 5 Pascal Confocal Microscope
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