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Desposition- AJA ATC ORION Series Thermal Evaporation System
- AJA ATC ORION Series Evaporation System
- AJA ATC ORION Series UHV Sputtering System
- CHA Electron-Beam Evaporator
- Cressington Gold Sputtering Deposition
- Home-Built Sputter System
- Neocera Pulsed Laser Deposition Facilities
- Nickel Electroplating
- TRION ORION II PECVD/LPCVD System
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DISTINGUISHED SPEAKER SERIES MICRO & NANO-SYSTEMS
ATTEND SPEAKER SERIES
RSVP to Thanh Bui at tbui@uta.edu or 817-272-1536. This series is in conjunction with EE 5344 – Introduction to MEMS, which is offered by UTA. Information about this course and microsensor activities at UTA can be obtained from Professor Z. Celik-Butler at zbutler@uta.edu. - CONTACTS
Facility
KLA-Tencor Alpha-Step IQ Profilometer
*Surface profilometer with 400 micron vertical range.
*Alpha-Step precision scanner standard vertical range to 400um with sub-angstrom electronic bit-wise vertical resolution.
*Zoom optics (88-247x)
*Stylus, 5um – 60Degree Radius
*Maximum scan length: 10mm
*Manual precision X-Y stage, 6.2” diameter theta table
*Acoustic Isolation hood and vibration isolation supports.
All Characterization Facilities
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- SEM-FIB-Ebeam Writer Application
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- Equipment Reservation and Status
- Nano-MEMS Ph.D. Diagnostic Exam Information
- Student Travel Application
- NanoFab Cleanroom Rules and Guidelines
- Cleanroom Rules Violation Form
- Safety Protocol Training Schedule
UT Arlington | College of Engineering | Contacts
Open to scientists with and outside UT Arlington, The Nanotechnology
Research & Education Center is the preeminent university-based
nanotechnology research, development, and teaching facility in North Texas.