Facility

KLA-Tencor Alpha-Step IQ Profilometer

*Surface profilometer with 400 micron vertical range.

*Alpha-Step precision scanner standard vertical range to 400um with sub-angstrom electronic bit-wise vertical resolution.

*Zoom optics (88-247x)

*Stylus, 5um – 60Degree Radius

*Maximum scan length: 10mm

*Manual precision X-Y stage, 6.2” diameter theta table

*Acoustic Isolation hood and vibration isolation supports.

 


All Characterization Facilities

Dimension 5000 AFM
Electrical Test Station
HP 4061A Test Station
KLA-Tencor Alpha-Step IQ Profilometer
KLA-TENCOR PROFILOMETER
Nomarski Microscope
OCEAN OPTICS NC-UV-VIS REFLECTOMETER
Zeiss LSM 5 Pascal Confocal Microscope
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