Facility

TRION ORION II PECVD/LPCVD System

Deposition capabilities of large and fine grain-size polysilicon, amorphous silicon, stress-free silicon nitride and silicon dioxide.

TRION Plasma Enhance Chemical Vapor Deposition System
 


All Deposition and Etching Facilities

AJA ATC ORION Series Thermal Evaporation System
AJA ATC ORION Series Evaporation System
AJA ATC ORION Series UHV Sputtering System
CHA Electron-Beam Evaporator
Cressington Gold Sputtering Deposition
Home-Built Sputter System
KJL LAB 18 Sputtering
Neocera Pulsed Laser Deposition Facilities
Nickel Electroplating
TRION ORION II PECVD/LPCVD System
Back to All Facilities