Facility

Diener Electronics Asher

PLASMA-PROCESSOR TYPE “PICO-UHP-RF” WITH SEMI-AUTOMATIC CONTROL
2 process gases; controlled with brass needle valve
Pressure measuring with pirani sensor
Frequency: 13.56 MHz
Power: 0-300 W; infinitely variable
Max. temperature: approx. 150 C, Thermocouple, Temperature regulator
Material: chamber: borosilicate glass, door: aluminium
Internal dimension: Diameter: approx. 130 mm, Length: approx. 300 mm
The chamber can be filled with 2 quartz boats for 4’’ wafers

 


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