| Name | WorkStatus | Return To Service | Tool Operator |
|---|
| AFM-DI-Dimension5000 | UP | | Kevin Chambers |
| Aligner-KarlSuss-MJB3 | UP | | Dennis Bueno |
| Backside-Aligner-OAI806MBA | UP | | Dennis Bueno |
| Blue-Oven-MIGP6680 | UP | | Dennis Bueno |
| Cole-Parmer-Hotplate-1 | UP | | Dennis Bueno |
| Cole-Parmer-Hotplate-2 | UP | | Dennis Bueno |
| Cole-Parmer-Hotplate-3-SoftBak | UP | | Dennis Bueno |
| Cole-Parmer-Hotplate-4-PEB | UP | | Dennis Bueno |
| Confocal | UP | | Richard Wells |
| Cressington-108AutoSE-Gold-Spu | UP | | Richard Wells |
| Deiner-Asher-Pico | UP | | Richard Wells |
| DI-Water-System-Bay1-1 | DOWN | 2013-05-28 | Kevin Chambers |
| DI-Water-System-Bay1-2 | UP | | Kevin Chambers |
| DI-Water-System-Bay4 | DOWN | 2013-10-01 | Richard Wells |
| DI-Water-System-TFAB | UP | | Richard Wells |
| Dicer-Disco-Automation | UP | | Paul Logan |
| Dicer-MicroAutomation | UP | | Dennis Bueno |
| DiffusionFurnace-MiniBrute | UP | | Richard Wells |
| DRIE-Etcher-TRION | UP | | Dennis Bueno |
| E-beam-Evaporator-CHA | UP | | Richard Wells |
| ebeam-evaporator-AJA | UP | | Richard Wells |
| ElectricalTest-Agilent-4155C-4 | UP | | Dennis Bueno |
| ElectricalTest-HP-4061A | UP | | Dennis Bueno |
| ElectricalTest-TFAB | UP | | Dennis Bueno |
| Ellipsometer-Gaetner-LS300 | UP | | Richard Wells |
| EVG520IS-Wafer-Bonder | UP | | Kevin Chambers |
| EVG620-Aligner | UP | | Dennis Bueno |
| FIB/E-Beam-Writer-Zeiss1540 | UP | | Richard Wells |
| Four-Point-Probe-Jandel | UP | | Dennis Bueno |
| Four-Point-Probe-Veeco-FPP5000 | UP | | Dennis Bueno |
| Hotplates-Signatone | UP | | Dennis Bueno |
| InertATM-Oven-BlueM-IGP6680 | UP | | Richard Wells |
| KJL-LAB18-SPUTTER | UP | | Kevin Chambers |
| LPCVD-Nitride-Tystar | UP | | Dennis Bueno |
| Mini-Brute-General-Bay3 | UP | | Kevin Chambers |
| Mini-Brute-PType-Bay3 | UP | | Kevin Chambers |
| Nanoimprinter-Nanonex-NXB200 | UP | | Kevin Chambers |
| Nickel-Electroplating | UP | | Kevin Chambers |
| NomarskiMicroscope-Nikon | UP | | Dennis Bueno |
| Optical-Microscope-Bay1 | UP | | Dennis Bueno |
| Optical-Microscope-TFAB-Yellow | UP | | Dennis Bueno |
| Optical-Micrscope-TFAB | UP | | Dennis Bueno |
| Oxidation-Furnace-Tystar | UP | | Dennis Bueno |
| Oxidation-Furncae-Lindberg | UP | | Dennis Bueno |
| PECVD-LPCVD-TRION-ORION-II | UP | | Dennis Bueno |
| PlasmaEtcher-PlasmaTherm500 | UP | | Kevin Chambers |
| ProbeStation-M&M-6000 | UP | | Dennis Bueno |
| ProbeStation-M&M-8060 | UP | | Dennis Bueno |
| ProbeStation-VariableTemp | UP | | Dennis Bueno |
| Profilometer-AlphaStep-IQ | UP | | Richard Wells |
| Profilometer-P6 | UP | | Richard Wells |
| Pulsed-Laser-Deposition | UP | | Kevin Chambers |
| Reflectometer-OceanOptics | UP | | Richard Wells |
| RIE-Etcher-TRION-MINILOCK-II | UP | | Kevin Chambers |
| RIE-Technics-MicroRIE800 | UP | | Kevin Chambers |
| RTA-JetFirst-150 | UP | | Kevin Chambers |
| SEM-EDS-Zeiss-Supra55VP-EDAX40 | UP | | Richard Wells |
| Spinner-Headway-Bay1 | UP | | Dennis Bueno |
| Spinner-Headway-TFAB | UP | | Dennis Bueno |
| Sputter-AJA | UP | | Kevin Chambers |
| Sputter-Homebuilt | UP | | Kevin Chambers |
| Super-Critical-Point-Dryer | UP | | Kevin Chambers |
| Thermal-Evaporator-AJA | UP | | Richard Wells |
| Thermal-Evaporator-NRC3117 | UP | | Richard Wells |
| UHV-STM-RHK-UHV3000 | UP | | Nader Hozhabri |
| UV-CURE | UP | | Kevin Chambers |
| WeighingScale-TeachingFab | UP | | Dennis Bueno |
| Wire-Bonder-Kulicke-4524 | UP | | Dennis Bueno |
| WireBonder-KS | UP | | Dennis Bueno |
| WireBonder-WestBond-7476E | UP | | Dennis Bueno |
