Welcome to Nanofab Reservation System!

Login

Equipment Reservation Rules!!

Clean Room Equipment


NameWorkStatusReturn To ServiceTool Operator
AFM-DI-Dimension5000
UP
Kevin Chambers
Aligner-KarlSuss-MJB3
UP
Dennis Bueno
Backside-Aligner-OAI806MBA
UP
Dennis Bueno
Blue-Oven-MIGP6680
UP
Dennis Bueno
Cole-Parmer-Hotplate-1
UP
Dennis Bueno
Cole-Parmer-Hotplate-2
UP
Dennis Bueno
Cole-Parmer-Hotplate-3-SoftBak
UP
Dennis Bueno
Cole-Parmer-Hotplate-4-PEB
UP
Dennis Bueno
Cole-Parmer-Hotplate-5
UP
Dennis Bueno
Cole-Parmer-Hotplate-6
UP
Dennis Bueno
Confocal
UP
Dennis Bueno
Cressington-108AutoSE-Gold-Spu
UP
Kevin Chambers
Deiner-Asher-Pico
UP
Kevin Chambers
DI-Water-System-Bay1-1
UP
Kevin Chambers
DI-Water-System-Bay1-2
UP
Kevin Chambers
DI-Water-System-Bay4
UP
Kevin Chambers
DI-Water-System-TFAB
UP
Kevin Chambers
Dicer-Disco-Automation
DOWN
2017-10-31
Kevin Chambers
DiffusionFurnace-MiniBrute
UP
Dennis Bueno
DRIE-Etcher-TRION
UP
Huan Nguyen
E-beam-Evaporator-CHA
UP
Kevin Chambers
E-Beam-Evaporator-Solution
UP
Kevin Chambers
E-Beam-Writer-Zeiss1540
UP
Huan Nguyen
ebeam-evaporator-AJA
UP
Dennis Bueno
EDAX40-Zeiss-Supra55VP
UP
Huan Nguyen
ElectricalTest-Agilent-4155C-4
UP
Dennis Bueno
ElectricalTest-HP-4061A
UP
Dennis Bueno
ElectricalTest-TFAB
UP
Dennis Bueno
Ellipsometer-Gaetner-LS300
UP
Kevin Chambers
EVG520-6inch-Wafer-Bonder
UP
Kevin Chambers
EVG520IS-Wafer-Bonder
UP
Huan Nguyen
EVG620-Aligner
UP
Huan Nguyen
EVG620-Aligner-Bay1
UP
Huan Nguyen
FIB-Zeiss1540
UP
Kevin Chambers
Four-Point-Probe-Jandel
UP
Dennis Bueno
Four-Point-Probe-Veeco-FPP5000
UP
Dennis Bueno
Hotplates-Signatone
UP
Dennis Bueno
KJL-LAB18-SPUTTER
UP
Kevin Chambers
Leica-Microscope
UP
Huan Nguyen
LPCVD-Nitride-Tystar
UP
Dennis Bueno
March-Asher
UP
Dennis Bueno
Metricon_2010
UP
Dennis Bueno
Mini-Brute-General-Bay3
UP
Kevin Chambers
Mini-Brute-PType-Bay3
UP
Kevin Chambers
Nanoimprinter-Nanonex-NXB200
UP
Kevin Chambers
Nanospec_4150
UP
Kevin Chambers
Nickel-Electroplating
UP
Huan Nguyen
NomarskiMicroscope-Nikon
UP
Dennis Bueno
Optical-Microscope-Bay1
UP
Dennis Bueno
Optical-Microscope-TFAB-Yellow
UP
Dennis Bueno
Optical-Micrscope-TFAB
UP
Dennis Bueno
Oxidation-Furnace-Tystar
UP
Dennis Bueno
Oxidation-Furncae-Lindberg
UP
Dennis Bueno
PECVD-LPCVD-TRION-ORION-II
UP
Dennis Bueno
PlasmaEtcher-PlasmaTherm500
UP
Kevin Chambers
ProbeStation-M&M-6000
UP
Dennis Bueno
ProbeStation-M&M-8060
UP
Dennis Bueno
ProbeStation-VariableTemp
UP
Dennis Bueno
Profilometer-AlphaStep-IQ
UP
Dennis Bueno
Profilometer-P6
UP
Kevin Chambers
Pulsed-Laser-Deposition
UP
Kevin Chambers
Reflectometer-OceanOptics
UP
Huan Nguyen
RIE-Etcher-TRION-MINILOCK-II
UP
Kevin Chambers
RIE-Technics-MicroRIE800
UP
Huan Nguyen
RTA-JetFirst-150
UP
Kevin Chambers
SEM-Zeiss-Supra55VP
UP
Huan Nguyen
SEM_FEI
UP
Huan Nguyen
Spinner-Headway-Bay1-1
UP
Dennis Bueno
Spinner-Headway-Bay1-2
UP
Dennis Bueno
Spinner-Headway-Bay1-3
UP
Dennis Bueno
Spinner-Headway-TFAB
UP
Dennis Bueno
Sputter-AJA
UP
Kevin Chambers
Sputter-Homebuilt
UP
Kevin Chambers
Super-Critical-Point-Dryer
UP
Kevin Chambers
Thermal-Evaporator-AJA
UP
Dennis Bueno
Thermal-Evaporator-NRC3117
UP
Dennis Bueno
UHV-STM-RHK-UHV3000
UP
Nader Hozhabri
UV-CURE
UP
Kevin Chambers
WeighingScale-TeachingFab
UP
Dennis Bueno
Wire-Bonder-Kulicke-4524
UP
Dennis Bueno
WireBonder-WestBond-7476E
UP
Dennis Bueno