20 Bilayers

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Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View
3D View
Histogram

 

Table 2    Computed roughness parameters for the AFM data for Poly S-119, 20 bilayer ISAM film.
Scan Size
(m)
Avg. Height (nm) RMS Dev. (nm) Mean Dev. (nm) Max. Dev. (nm) Rp (nm) Rt (nm) Rv (nm) Rz (nm)
20x20 15.768 4.112 3.12 31.57 31.57 47.338 15.768 47.336
10x10 14.12 3.862 2.942 31.928 31.928 46.048 14.12 46.047
5x5 14.208 3.904 2.85 33.92 33.92 48.128 14.208 48.127

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