30 Bilayers

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Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View      
3D View      
Histogram      

 

 

Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View
3D View
Histogram

 

Table 2    Computed roughness parameters for the AFM data for Poly S-119, 30 bilayer ISAM film.
Scan Size
(m)
Avg. Height (nm) RMS Dev. (nm) Mean Dev. (nm) Max. Dev. (nm) Rp (nm) Rt (nm) Rv (nm) Rz (nm)
20x20 19.24 4.712 3.496 43.021 43.021 62.261 19.24 62.26
10x10 20.104 4.515 3.543 34.793 34.793 54.897 20.104 54.896
5x5 15.703 4.501 3.539 25.445 25.445 41.147 15.703 41.146

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