40 Bilayers

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Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View
3D View
Histogram

 

Table 2    Computed roughness parameters for the AFM data for Poly S-119, 40 bilayer ISAM film.
Scan Size
(m)
Avg. Height (nm) RMS Dev. (nm) Mean Dev. (nm) Max. Dev. (nm) Rp (nm) Rt (nm) Rv (nm) Rz (nm)
20x20 39.855 7.717 6.031 67.144 67.144 107.0 39.855 107.0
10x10 48.663 7.962 6.043 48.663 37.018 85.682 48.663 85.679
5x5 43.356 8.651 6.704 43.356 27.04 70.935 43.356 70.393

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