50 Bilayers

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Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View
3D View
Histogram

 

Table 2    Computed roughness parameters for the AFM data for Poly S-119, 50 bilayer ISAM film.
Scan Size
(m)
Avg. Height (nm) RMS Dev. (nm) Mean Dev. (nm) Max. Dev. (nm) Rp (nm) Rt (nm) Rv (nm) Rz (nm)
20x20 38.027 6.407 4.808 85.501 85.501 123.53 38.027 123.52
10x10 40.816 6.123 4.682 40.816 34.214 75.03 40.816 75.028
5x5 36.749 6.088 4.693 36.749 25.906 62.655 36.749 62.654

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