60 Bilayers

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Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View
3D View
Histogram

 

Table 2    Computed roughness parameters for the AFM data for Poly S-119, 60 bilayer ISAM film.
Scan Size
(m)
Avg. Height (nm) RMS Dev. (nm) Mean Dev. (nm) Max. Dev. (nm) Rp (nm) Rt (nm) Rv (nm) Rz (nm)
20x20 53.685 9.855 7.645 97.333 97.333 151.02 53.685 151.01
10x10 49.936 9.941 7.756 49.936 39.279 89.215 49.936 89.213
5x5 34.599 9.418 7.388 39.474 39.474 74.074 34.599 74.071

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