70 Bilayers

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Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View
3D View
Histogram

 

Table 2    Computed roughness parameters for the AFM data for Poly S-119, 70 bilayer ISAM film.
Scan Size
(m)
Avg. Height (nm) RMS Dev. (nm) Mean Dev. (nm) Max. Dev. (nm) Rp (nm) Rt (nm) Rv (nm) Rz (nm)
20x20 56.548 12.043 9.492 69.241 69.241 125.79 56.548 125.79
10x10 64.255 13.08 10.339 64.255 46.154 110.41 64.255 110.41
5x5 54.271 14.528 11.316 61.462 61.462 115.73 54.271 115.73

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