80 Bilayer

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Table 1    AFM images and height histogram data for Poly S-119, 20 bilayer ISAM film (click on the pictures to enlarge)
  20x20 m 10x10 m 5x5 m
Top View
3D View
Histogram

 

Table 2    Computed roughness parameters for the AFM data for Poly S-119, 80 bilayer ISAM film.
Scan Size
(m)
Avg. Height (nm) RMS Dev. (nm) Mean Dev. (nm) Max. Dev. (nm) Rp (nm) Rt (nm) Rv (nm) Rz (nm)
20x20 61.665 10.448 7.76 132.07 132.07 193.73 61.665 193.73
10x10 46.359 10.779 8.46 53.595 53.595 99.954 46.359 99.951
5x5 41.66 8.86 6.861 41.66 37.418 79.078 41.66 79.075

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