21–26 January 2006

San Jose, California, USA

Conference 6109
Room: Hilton Hotel: University Room
Wednesday 25 January 2006
Proceedings of SPIE Vol. #6109

Monday 23 January

Wednesday 25 January

SESSION 1

Hilton Hotel: University Room Wed. 8:00 to 9:00 am

Devices I

Chair: Mary-Ann Maher, SoftMEMS

8:00 am: Injection molded microfluidic devices for biological sample separation and detection (Invited Paper), A. M. Morales, B. A. Simmons, T. I. Wallow, E. B. Cummings, R. V. Davalos, L. A. Domeier, M. C. Hunter, G. J. McGraw, Sandia National Labs. [6109-01]

8:40 am: Nanofabrication of electrochemical probes for single cell analysis, R. J. Fasching, S. Bai, F. Prinz, Stanford Univ. [6109-02]

SESSION 2

Hilton Hotel: University Room Wed. 9:00 to 11:50 am

Devices II

Chair: Jeongsik Sin, The Univ. of Texas at Arlington

9:00 am: Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining, B. S. Citla, S. Venkataraman, J. Murakowski, G. J. Schneider, D. W. Prather, Univ. of Delaware [6109-03]

9:20 am: Assembled Fourier transform microspectrometer, J. Sin, W. H. Lee, D. Popa, H. E. Stephanou, The Univ. of Texas at Arlington [6109-04]

9:40 am: Polymer-based Fabry-Perot filter integrated with 3D MEMS structures, P. Zhang, K. Le, S. M. N. Rao, L. Hsu, J. Chiao, The Univ. of Texas at Arlington [6109-05]

Coffee Break 10:00 to 10:30 am

10:30 am: An optical scanner based on electromagnetically actuated optical fiber, H. P. Hu, K. D. Le, J. Chiao, The Univ. of Texas at Arlington [6109-06]

10:50 am: Enhancement of structural stiffness in MEMS structures, S. Ilias, F. Picard, P. Topart, C. Larouche, H. Jerominek, Institut National d'Optique (Canada) [6109-07]

11:10 am: Process design and tracking support for MEMS, A. Wagener, J. Popp, Univ. of Siegen (Germany); D. Ortloff, Cavendish-Kinetics B.V. (Netherlands); T. Schmidt, K. Hahn, R. Brueck, Univ. of Siegen (Germany) [6109-08]

11:30 am: Fabrication of integrated light guiding plate for backlight system, Z. Chen, C. Chien, Tatung Univ. (Taiwan) [6109-09]

Lunch/Exhibition Break 11:50 am to 1:20 pm

SESSION 3

Hilton Hotel: University Room Wed. 1:20 to 2:20 pm

Fabrication Techniques I

Chair: Harold D. Stewart, Sandia National Labs.

1:20 pm: Advancing three-dimensional MEMS by complimentary laser micromanufacturing, J. A. Palmer, J. D. Williams, T. Lemp, Sandia National Labs.; F. R. Medina, R. B. Wicker, The Univ. of Texas at El Paso [6109-11]

1:40 pm: Microstereolithography production of integrated Hadamard mask structures, C. J. Robinson, L. M. Southwell, J. A. Palmer, B. Chavez, M. W. Smith, M. B. Sinclair, Sandia National Labs.; F. Medina, R. B. Wicker, The Univ. of Texas at El Paso; B. Stucker, Utah State Univ. [6109-12]

2:00 pm: Optical analysis of scanning microstereolithography systems, S. P. Deshmukh, P. S. Gandhi, S. K. Dubey, Indian Institute of Technology Bombay (India) [6109-14]

SESSION 4

Hilton Hotel: University Room Wed. 2:20 to 4:10 pm

Fabrication Techniques II

Chair: Nan Zhang, General MEMS Corp.

2:20 pm: High-aspect-ratio plasma etching of bulk lead zirconate titanate, S. S. Subasinghe, S. A. Tadigadapa, The Pennsylvania State Univ. [6109-15]

2:40 pm: Fabrication of micro-chambers and enclosures using synchronus localized electro-deposition, R. A. Said, United Arab Emirates Univ. (United Arab Emirates) [6109-16]

Coffee Break 3:00 to 3:30 pm

3:30 pm: Enhanced filling of interconnect deep trenches using forced convection magneto-electroplating, R. A. Said, United Arab Emirates Univ. (United Arab Emirates) [6109-17]

3:50 pm: Anisotropic etching of single crystalline SiC using molten KOH for SiC bulk micromachining, K. Fukunaga, J. Suda, T. Kimoto, Kyoto Univ. (Japan) [6109-18]

SESSION 5

Hilton Hotel: University Room Wed. 4:10 to 5:30 pm

Metrology and Test

Chair: Mary-Ann Maher, SoftMEMS

4:10 pm: Zero-crossing edge detection for visual force measurement in assembly of MEMS devices, Y. H. Anis, J. K. Mills, W. L. Cleghorn, Univ. of Toronto (Canada) [6109-19]

4:30 pm: Endpoint detection method for time division multiplex etch processes, R. J. Westerman, D. Johnson, S. Lai, M. Teixeira, Unaxis USA, Inc. [6109-20]

4:50 pm: Combined low-coherence interferometry and spectrally resolved reflectometry for nondestructive characterization of small-diameter high-aspect ratio microfabricated and micromachined structures, and mulilayer membranes, W. J. Walecki, T. Azfar, A. Pravdivstev, M. Santos II, A. Koo, Frontier Semiconductor Inc. [6109-21]

5:10 pm: Out-of-plane deformation of freestanding micro-rings for tensile stress measurements, Y. Chen, National Tsing Hua Univ. (Taiwan) [6109-22]

Posters -Wednesday

Posters will be placed on display after 10:00 am on Wednesday in the Parkside Hall. A poster session, with authors present at their posters, will be held Wednesday evening from 6:00 to 8:00 pm. Light refreshments will be served.

• Research on Ni-electroplating of double-width micro-cantilever, Y. Liu, D. Sun, Xiamen Univ. (China) [6109-23]
• Investigation on overplating high-aspect-ratio microstructure, Y. Guo, G. Liu, Y. Tian, Univ. of Science and Technology of China (China) [6109-24]
• Characterization of nonlinear optical thin-film fabricated with dye-doped UV curing epoxy, K. Le, P. Zhang, H. P. Hu, J. Chiao, The Univ. of Texas at Arlington [6109-25]
• A curled-hinge comb micromirror using CMOS-MEMS process, Y. R. Huang, H. M. Tai, H. Chou, National Tsing Hua Univ. (Taiwan) [6109-26]
• 5~10 GHz surface acoustic-wave resonators and low-loss wide-band filters using submicron fabrication technology, K. Yamanouchi, Y. Satoh, H. Isono, Tohoku Institute of Technology (Japan) [6109-27]
• Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment, M. Brunet, P. Dubreuil, E. Scheid, J. Sanchez, Lab. d'Analyse et d'Architecture des Systèmes (France) [6109-29]