UTA, MEMSCAP, and SoftMEMS host:

MUMPs^® User Group Meeting

Come learn about micro- and nano- research being conducted at ARRI, TCU, and DFW companies
using the Multi User MEMS Processes (MUMPs), and find out how to utilize MUMPs® in your research.

TOPICS PRESENTED
Why Standard Processes? Technical Overview of MUMPs® Presentation of MUMPs Reference Material CMOS-MEMS Through ASIMPS		“MUMPs® at Zyvex” by George Skidmore, Zyvex MUMPs-PLUS: Semi-Custom Processing MUMPs® at UTA, ARRI, and TCU Overview of SoftMEMS CAD Suite (MEMS Pro)
Friday, February 18, 2005 9:00 am – 3:00 pm Nedderman Hall Room 105 University of Texas at Arlington
(FREE ADMISSION)

For more info: Busbee Hardy buzz.hardy@memscapinc.com			MUMPs Website: www.memscap.com Click “MEMSRUS” link


PolyMUMPs™	SOIMUMPs™		MetalMUMPs™

Registration

Pre-registration is required so we have an accurate headcount for materials.

Please register by Feb. 14.

Click here to enter the registration site.

	How to get to the Workshop? – Driving direction and parking. Physical Address 416 Yates Street, Arlington, Texas 76019 Please request a parking tag (free) in your registration form. The tag can be pickup at the registration desk when you check in. Sorry! You have to make a trip back to your car to hang the tag on the rearview mirror – or you might get a parking ticket. We have only 25 free parking tags available. It is “first-come first serve”. If you desire to receive the parking tag in the mail. Please fill your registration form by Feb. 9. Please only park at the visitor space (light blue area in the campus map).
	Hotel information
	Weather information
	DFW Traffic information

	UTA MEMS Classes Introduction of MEMS Advanced MEMS UTA/TCU Introduction of MEMS - Summer
	Dallas/Fort Worth MEMS Efforts UTA - MEMS UTA - RFMEMS UTA - Smart Skin UTA - Microsensors UTA – Medical MEMS UTA - BioMEMS UTA/ARRI Control and MEMS UTA - EMTSPC NanoFab Center Zyvex TCU UTD - Minds MicroFab TI-DLP
	Workshop Agenda 9 AM – Noon Busbee Hardy, MUMPs Program Manager, MEMSCAP - MEMSCAP update - Designing for Standard Processes Steve Wilcenski, Product Engineering Manager, MEMSCAP - SOIMUMPs and MetalMUMPs process flow overview - How to Best Leverage MUMPs in Research Dr. Mary Ann Maher, SoftMEMS - MEMS Pro for MUMPs 12 – 1 PM Lunch 1 – 2 PM Dr. George Skidmore, Zyvex - MUMPs Processes for Microassembly 2 – 2:45 PM Professor Edward Kolesar - MEMS research work using MUMPS at TCU 2:45 - 3:15PM Neil Sarkar, Zyvex - Graduate student’s research experience using MUMPS program 3:30PM MEMS Pro Demo