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Diener Electronics Asher

PLASMA-PROCESSOR TYPE “PICO-UHP-RF” WITH SEMI-AUTOMATIC CONTROL

Low pressure plasma system

Features


2 process gases; controlled with brass needle valve

Pressure measuring with pirani sensor

Frequency: 13.56 MHz

Power: 0-300 W; infinitely variable

Max. temperature: approx. 150 C, Thermocouple, Temperature regulator

Material: chamber: borosilicate glass, door: aluminium

Internal dimension: Diameter: approx. 130 mm, Length: approx. 300 mm

The chamber can be filled with 2 quartz boats for 4’’ wafers